Seal for semiconductor manufacturing equipment

Abstract

Fig. 1.1 is a front view of the seal for semiconductor manufacturing equipment showing my new design; fig. 1.2 is a back view thereof; fig. 1.3 is a right view thereof; fig. 1.4 is a left view thereof; fig. 1.5 is a top view thereof; fig. 1.6 is a bottom view thereof; fig. 1.7 is a perspective view thereof; fig. 1.8 is a cross-sectional view taken along line A-A of fig. 1.1 thereof; fig. 1.9 is an enlarged view of B-B portion of fig. 1.8 thereof; and fig. 1.10 is an enlarged view of C-D portion of fig. 1.1.

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