Litho-Etch-Litho-Etch Multiple Patterning Process Integration Patents

Search. Every figure on this page comes from one Patsnap search, run once and not edited afterwards. This is the exact search string:

TAC:(("litho-etch-litho-etch" OR LELE) AND ("multiple patterning" OR "double patterning") AND (semiconductor OR lithography OR photomask))

Reading the field codes: TAC searches the title, abstract and claims of each record, not the full description. The search string sets no date limit, so the scope is every matching record in the database regardless of when it was filed. It is not restricted to recent years. How this string was built matters for how far the counts can be pushed. It was generated in batch from a topic list rather than hand-crafted for this page, and the result set is not manually screened. A keyword search over title, abstract and claims both over-captures (unrelated filings that happen to use the same words) and under-captures (the same invention written in different words). This page cannot measure either effect, so read every figure here as what this particular string returned, not as what exists in the field. One subclass (H01L) carries 83.3% of the patent families, so this search returned a classification-tight set.

What is being counted. Two different units appear on this page and they are not interchangeable. The filer list and the technology split are counted in simple (DOCDB) patent families: one invention counts once however many countries it was filed in. The total, the jurisdiction split and the filing-year chart are counted in published records: the same invention counts once per publication. For this search that is 37 records and 18 families. Record counts reward filing in many jurisdictions; family counts do not. Shares are only ever taken against a denominator in the same unit, and each one names it.

Who the filers are. Names come from Patsnap's standardised assignee field, as recorded on the documents themselves. They are not rolled up to corporate group: a parent and its subsidiaries appear as separate entries, and a portfolio acquired from another company stays under the name on the document unless the assignment is reflected there. This list is meant to carry organisations, not people. Filings held by a named individual are identified by matching the assignee against the inventors on the same search, and, for names written in Chinese, Japanese or Korean characters, by the name carrying no organisational suffix; those are removed from the list. Neither test is exhaustive: the inventor list it matches against is itself capped, and a personal name written in Latin script with no organisational wording in it cannot be told apart from a short company name by rule. So an individually held filing can still appear in the list. Those filings stay inside every total and share on this page either way, so the listed entries can add up to less than the total. A record shown in full further down still names its assignee exactly as the patent office records it, including where that is a person: that name is how the record is identified and checked. What is left out of the ranking is people as ranked entries, not people as cited sources. The table shows the top 10 of the 10 filers returned, ordered by count alone; the data endpoint returns at most 100 entities, so even that 10 is not every filer. One patent family can name several filers and each is counted separately, so these rows are not slices of a divided whole: adding them together over-counts, and this page deliberately publishes no combined "top five" share for that reason. See every filer, individuals included

Dates. The year chart counts by earliest filing year, not publication year. A filing only becomes visible once it publishes: roughly 18 months for most routes, and up to 30 months where a PCT application enters national phase. Measured across these pages, the year four back from today still holds only about 89% of its eventual count. 2022 onwards are therefore shaded on the chart as still filling in. The data behind this page was retrieved on 2026-10-26.

Legal status. "In force" counts documents whose legal status at retrieval was granted and maintained (21 of 37). Everything else is pending, withdrawn, refused, lapsed or not determinable, and those states are not broken out here because the underlying codes do not separate them cleanly. Legal status changes continuously and is reported per document, not per family. Get the status breakdown in Eureka

Classification. The technology split uses IPC subclasses (four characters, for example H01M). A single record usually carries several, so the shares add up to more than 100% and a record can appear in more than one bar. Subclass is a coarse grouping; it describes the field a record was classified into, not what the claims cover. Break the classes down to subgroup level

Who wrote the words. The tables, charts, counts, shares and patent numbers on this page are produced directly from the search result by a program; none of them are written or estimated by a language model. The surrounding prose, headings, FAQ answers and the answers in the question panel are drafted by a language model that is given those same figures and is not permitted to introduce others. Prose can still mis-describe a correct figure, so where the two disagree, the tables and charts are the record.