Separate drive and test frequencies enable detector abnormality diagnosis without complicating the sensor structure or degrading capacitance-based inertial measurement.
A partially fixed sensor base leaves the sensing region free to absorb thermal expansion, reducing stress and preserving detection accuracy.
Anti-phase stator drives and a fully differential layout isolate rotor deflection from moisture-driven parasitic capacitance during self-test.
A complex impedance circuit steepens phase response to detect tiny capacitance changes in grounded sensors while reducing frequency-to-amplitude modulation.
Adaptive pulse timing improves rotor speed accuracy by deriving ideal time windows and pulse counts from sensor pulses across periods.
Aggregated acceleration and jerk indicators detect structural anomalies with fewer false alarms, lower bandwidth, and timely alerts.