Segmented tubular members with corrugated bellows compensate for thermal growth differentials to minimize stress.
Segmenting pressure control with an intermediary regulator reduces temperature variations that cause uneven exposure in EUV lithography.
Ultrasonic agitation generates millions of micron-sized droplets to overcome nozzle limitations and boost cumulative power generation.
Integrating the support housing with the delivery system reduces device complexity and manufacturing costs while maintaining thermal shielding.
Segmented distribution walls split and redistribute skewed liquid fuel flow, enabling uniform atomization during air mixing.
Radial pilot fuel injection prevents overheating and quench pulsations during low-load operation.
A coiled metallic fuel conduit accommodates thermal expansion differences between combustors and nozzles to reduce NOx emissions.
Downstream injection nozzles direct highly reactive hydrogen fuel to prevent flashback and reduce NOx emissions in gas turbine burners.
Constant pilot gas flow stabilizes combustion pressure pulsations during gas turbine fuel switching operations.