Cold Traps/Baffles TRIZ Cases
- Staged Cold Trap Layout for High-Pressure Exhaust Byproducts
A staged cold trap uses cooling plates and a low-pressure downstream stage to solidify wafer-process byproducts before exhaust clogging.
- Cryopump First-Stage Array Layout for Gas Shielding and Conductance
A segmented first-stage array shields second-stage cryopanels from type I gases while preserving type II and III gas flow and lowering thermal load.