Electrostatic Cleaning TRIZ Cases
- Indirect Injection Nozzle for Substrate Drying
A substrate treating apparatus uses an indirect injection nozzle to direct drying fluid upwardly within a sealed chamber.
- Electrostatic Clamp Particle Removal Apparatus
An insulating and supporting apparatus generates an electric field to remove particles from electrostatic clamps.
- Contact Cleaning Apparatus for Curved Sheet Substrates
Flattening mechanism pre-flattens curved sheet leading edges to prevent crumpling and wrapping around elastomeric cleaning rollers.