Halogenated Silanes TRIZ Cases
- Low-Temperature Disilane Cleavage for Safe Chloromonosilane Conversion
Ether/HCl and related promoters cleave Siemens side-product disilanes below 200°C to raise chloromonosilane yield while avoiding popping gels.
Ether/HCl and related promoters cleave Siemens side-product disilanes below 200°C to raise chloromonosilane yield while avoiding popping gels.