Handling Using Diffraction/Refraction/Reflection TRIZ Cases
- Rotatable X-ray Optics for Point-Line Beam Conversion
A rotatable Kirkpatrick-Baez mirror arrangement conditions brilliant X-ray point sources to generate parallel line beams.
- Kirkpatrick-Baez EUV Optical System for High-Resolution Metrology
Two-stage Kirkpatrick-Baez mirrors focus divergent soft X-ray beams to resolve sub-10nm patterns, overcoming resolution limits of conventional optics.
- Curved X-ray Reflector via Thin Film Stress
Compressive thin film stress bends crystalline wafers into curved X-ray reflectors, eliminating external molds and reducing manufacturing complexity.
- Windowless Plasma Source for Broadband VUV Radiation
A windowless plasma source design extracts broadband radiation through an aperture using reflective optics to protect components from harsh environments.
- Radiation Window Protection Film Robustness
A radiation window uses a protection film to increase robustness.