Metal bumps and a relay substrate support the vibrator, eliminating resin outgassing that degrades frequency characteristics.
Groove-based degassing eliminates unstable dimension management and extended times, stabilizing hermetic sealing quality.
Protective cover prevents molding compound intrusion into resonant area, enabling copper pillar reflow bonding without frequency response alteration.
A translucent alumina ceramic supporting substrate enables visual alignment of piezoelectric layers during flip chip bonding.
Segmented silicon dioxide lamellas lower permittivity in the substrate, reducing switching losses and improving capacitive readout sensitivity.