A multilayer mirror reflects extreme ultraviolet radiation across two spectrally separated wavelength bands using optimized layer groups.
Relocating the shutter to the obscuration space eliminates focal plane structural interference, reducing design complexity and stray light control costs.
A white polyester film with controlled thickness and spherical particles enhances light reflectance for liquid crystal displays.
Nanovoided scattering layer redirects light into multilayer optical film at various angles to maintain high reflectivity.
Integrating a reflective photodiode merges detection and turning optics, reducing system size and component count.
Deformable mirrors adjust curvature via bending moments to set focal distance, resolving the trade-off between focus precision and mechanical complexity.
A guide member routes module signals through a housing opening, resolving the conflict between minimal bezel design and internal mounting space.
A microlithography projection lens positions an accessible diaphragm plane at a specific radial distance to enable precise iris stop installation.
Homogeneous waffle structures with embedded heaters eliminate thermal expansion mismatches to suppress local deformation in satellite mirrors.
Replacing flat mirrors with an aspheric figure corrects off-axis aberrations, tripling image quality across double the field of view.
A mirror module design uses matched thermal expansion materials to minimize structural deformation.
Laser-induced channels in transparent substrates replace mechanical scribing to eliminate uneven edges and particulate contamination.
Pre-deposition thermal treatment reduces internal stress in EUV mirror stacks, preventing capping layer cracking and preserving reflectivity.
A surveying system window mechanically connects measuring and rotating mirror units to support structural alignment.
Composite powder enables low-temperature sintering at 900°C or less, preventing silver paste melting while maintaining high light reflectance.
Placing a deflector in the largest air gap folds the optical path, reducing projection distance while maintaining aberration control.
A laser system uses an inclined beam to strike a conical mirror, creating linear markings without extra deflecting optics.