Movable Microstructural Devices TRIZ Cases
- MEMS Mirror Comb Actuator Structure for Vibration-Resistant Tilting
A three-layer comb actuator and mass-centered two-layer hinge boost MEMS mirror torque and hold deflection under vibration.
A three-layer comb actuator and mass-centered two-layer hinge boost MEMS mirror torque and hold deflection under vibration.