2D Material Electromagnetic Detector Structure for Sensitivity and Off-State

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Solution Overview

Problem

Conventional electromagnetic wave detectors using two-dimensional materials like graphene face challenges in achieving high sensitivity and off operation simultaneously due to limitations in transistor operation and quantum efficiency.

Innovation Solution

The design includes a semiconductor layer with a step structure, an insulating film, and a two-dimensional material layer with electrical connections, allowing for high detection sensitivity and off operation by optimizing the electrical connections and photogating effects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If voltage is applied to the graphene layer through source and drain electrodes to perform transistor operation, then sensitivity is improved through amplification of optical carriers, but off operation becomes difficult to achieve

Engineering Contradiction:
Improvedetection sensitivityVSAvoidoff operation capability
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The graphene layer is segmented into a channel region (for sensitivity) and contact regions (for electrical connection), separated by dielectric layers. This segmentation allows the channel region to function as a photodetector while the contact regions enable Schottky junction formation for off operation, resolving the contradiction between sensitivity and off operation capability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Dielectric layers are introduced as intermediary elements between the graphene layer and the substrate/electrodes. These dielectric layers enable independent control of the channel region and contact regions, allowing the channel to detect light while the Schottky junction at the contact regions provides off operation capability

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of operation

If voltage is applied to the gate electrode and source or drain electrode to perform Schottky operation, then off operation is enabled, but sensitivity decreases due to insufficient photocarrier amplification

Engineering Contradiction:
Improveoff operation capabilityVSAvoiddetection sensitivity
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The graphene layer is divided into distinct functional regions: a channel region for photodetection and contact regions for Schottky junction formation. This segmentation allows the channel region to maintain high sensitivity while the contact regions provide off operation capability through Schottky barriers

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the graphene layer are given different functional qualities: the channel region is optimized for light detection with high carrier mobility, while the contact regions are optimized for Schottky junction formation. This local differentiation enables both high sensitivity and off operation capability to coexist

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the detection sensitivity and enables the detector to perform off operations effectively, improving the overall performance of the electromagnetic wave detector.

Implementation Method 1

an off operation is enabled by Schottky connection between the graphene and the n-type semiconductor layer

Methodology Applied
Scientific EffectSchottky connection: Photoelectric Effect

Implementation Method 2

optical carriers generated in the n-type semiconductor layer

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Implementation Method 3

optical carriers generated in the n-type semiconductor layer are amplified to increase the sensitivity of the detector

Methodology Applied
Scientific EffectPhotogating effect: Photoelectric Effect

Data Source

PatentUS12199113B2Electromagnetic wave detector and electromagnetic wave detector assembly
Publication Date: 2025.01.14 MITSUBISHI ELECTRIC CORP
  • US12199113B2 patent drawing
  • US12199113B2 patent drawing
  • US12199113B2 patent drawing

AI summary

An electromagnetic wave detector includes: a semiconductor layer in which a step is formed, the semiconductor layer having sensitivity to a detection wavelength; an insulating film disposed on the step and provided with an opening through which a part of the step is exposed; a two-dimensional material layer disposed on the insulating film and the opening, the two-dimensional material layer including a connection region electrically connected to the semiconductor layer in the opening; a first electrode disposed on the insulating film and electrically connected to the two-dimensional material layer; and a second electrode disposed on the semiconductor layer and electrically connected to the first electrode through the connection region of the two-dimensional material layer.