2D Material FET Structure With Nanoparticle Anchoring Against Peeling

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Solution Overview

Problem

Two-dimensional material layers, such as graphene, often peel off substrates due to inadequate adhesion, affecting the performance and reliability of devices like field effect transistors and biosensors.

Innovation Solution

Incorporating particles, preferably nanoparticles like gold or titanium, between the substrate and the two-dimensional material layer to enhance adhesion through an anchor effect, preventing peeling and ensuring stable device operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a material layer including two-dimensional material is disposed on a substrate, then the device structure is formed, but the material layer easily peels off the substrate due to inadequate adhesion

Engineering Contradiction:
Improveadhesion between material layer and substrateVSAvoidpeeling resistance
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent introduces particles as an intermediary layer between the substrate and the material layer. These particles serve as a mediator that enhances adhesion by providing mechanical interlocking and increased contact area, preventing the material layer from peeling off the substrate while maintaining the intended device structure and function

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If particles are interposed between the substrate and the material layer, then adhesion is enhanced and peeling is prevented, but the device structure becomes more complex

Engineering Contradiction:
Improveadhesion between material layer and substrateVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies particles locally at the interface between the substrate and material layer where adhesion is needed, rather than throughout the entire device structure. This localized application enhances adhesion at the critical interface while minimizing the overall structural complexity and maintaining simplicity in other device regions

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly reduces the likelihood of material layer peeling, maintaining signal integrity and preventing noise ratio degradation in devices like biosensors and field effect transistors, even under liquid conditions.

Implementation Method 1

Incorporating particles, preferably nanoparticles like gold or titanium, between the substrate and the two-dimensional material layer to enhance adhesion through an anchor effect, preventing peeling and ensuring stable device operation

Methodology Applied
Scientific EffectAnchor effect: Mechanical Fastener

Data Source

PatentUS20230378265A1Structure and field effect transistor
Publication Date: 2023.11.23 MURATA MFG CO LTD
  • US20230378265A1 patent drawing
  • US20230378265A1 patent drawing
  • US20230378265A1 patent drawing

AI summary

A field effect transistor includes a substrate, a material layer on a surface of the substrate and including a two-dimensional material or carbon nanotubes, and particles interposed between the substrate and the material layer.