2D Material Fabrication via Capping Layer Annealing

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Solution Overview

Problem

Current fabrication methods for two-dimensional materials, such as mechanical exfoliation, molecular beam epitaxy, and chemical vapor deposition, face challenges in producing high-quality, large-area materials due to manual effort requirements, limited scalability, and process complexity, including issues with precursor selection and vapor pressure control.

Innovation Solution

A fabrication method involving the formation of a thin film with a two-dimensional element on a substrate, followed by the deposition of a capping layer and annealing in a controlled atmosphere to produce a high-quality, large-area two-dimensional material film, which prevents three-dimensional growth and ensures stable quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If mechanical exfoliation method is used, then two-dimensional materials can be obtained, but manual effort is required and large area production is limited

Engineering Contradiction:
Improveautomation levelVSAvoidproduction area
Core Design Contradiction:
Ease of manufactureVSArea of stationary object

Solution Approach 1:

The patent replaces mechanical exfoliation with a chemical vapor deposition process where precursor materials react chemically to form two-dimensional materials on substrates. This substitution enables automated large-area production while maintaining material quality, directly resolving the contradiction between manual operation limitations and large-area production requirements

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent controls reaction parameters including temperature, pressure, and gas flow rates to optimize the chemical vapor deposition process. By adjusting these parameters, the method achieves both high-quality two-dimensional material formation and scalability to large substrate areas, resolving the contradiction between material quality and production scale

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If molecular beam epitaxy method is used, then few-layer two-dimensional materials can be deposited, but ultrahigh vacuum environment is required increasing process time and cost

Engineering Contradiction:
Improvelayer structure controlVSAvoidvacuum system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent uses an inert or controlled atmosphere environment instead of ultrahigh vacuum conditions for the chemical vapor deposition process. This approach maintains precise layer structure control while significantly simplifying the equipment requirements and reducing process complexity, directly addressing the contradiction between manufacturing precision and device complexity

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Solution Approach 2:

The patent employs readily available precursor materials and simplified equipment configurations that do not require expensive ultrahigh vacuum systems. This approach achieves comparable layer control precision while reducing equipment cost and operational complexity through the use of more accessible materials and processes

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Productivity

If chemical vapor deposition method is used, then production efficiency is improved, but process complexity increases due to precursor selection and vapor pressure control

Engineering Contradiction:
Improveproduction efficiencyVSAvoidprocess design complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent extracts and addresses the most critical process parameters (temperature, pressure, gas flow) while simplifying or standardizing other aspects such as precursor selection. By focusing control efforts on the most influential parameters and using commercially available precursors, the method maintains high production efficiency while reducing overall process design complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the production of uniform, high-quality two-dimensional material films over large areas with improved stability and controllability, reducing process complexity and enhancing manufacturing efficiency.

Implementation Method 1

annealing the thin film to form a two-dimensional material film after the capping layer is formed

Methodology Applied
Scientific EffectAnnealing: Annealing

Data Source

PatentUS10428427B2Fabrication method for two-dimensional materials
Publication Date: 2019.10.01 NAT CHIAO TUNG UNIV
  • US10428427B2 patent drawing
  • US10428427B2 patent drawing
  • US10428427B2 patent drawing

AI summary

A fabrication method for two-dimensional materials of the present invention includes the following steps: forming a thin film having at least one two-dimensional element on a substrate; forming at least one capping layer on the thin film; annealing the thin film to form a two-dimensional material film after the capping layer is formed.