2D Material Semiconductor Structure with Organic Spacer

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Solution Overview

Problem

Two-dimensional materials used in semiconductor structures often exhibit surface roughness and internal ripples due to their underlying substrate, which hinders their application in future semiconductor technologies.

Innovation Solution

A method involving the use of an electrically-conducting substrate with a solid organic spacer layer to deposit two-dimensional materials, reducing adhesion forces and surface roughness by acting as a 'cushion' or 'soft landing pad', thereby achieving highly smooth and flat surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If two-dimensional materials are deposited directly on an electrically-conducting substrate, then adhesion is improved, but surface roughness increases and internal ripples form

Engineering Contradiction:
ImproveadhesionVSAvoidsurface flatness
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The patent introduces an organic spacer layer as an intermediary between the electrically-conducting substrate and the two-dimensional material. This spacer layer acts as a mediator that decouples the adhesion function from the flatness requirement: it provides sufficient adhesion to hold the 2D material while its cushioning effect absorbs substrate roughness, preventing transfer to the 2D material surface.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The organic spacer layer serves as a pre-established cushioning layer deposited beforehand on the substrate. This cushioning layer compensates for substrate surface irregularities before the two-dimensional material is deposited, preventing the formation of ripples and maintaining surface flatness while still providing adequate adhesion.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

2Manufacturing precision

If the adhesion forces between substrate and two-dimensional material are reduced, then surface flatness is improved, but adhesion strength decreases

Engineering Contradiction:
Improvesurface flatnessVSAvoidadhesion strength
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The organic spacer layer functions as an intermediary that modulates the adhesion interaction. It provides sufficient adhesion strength to maintain the 2D material on the substrate while simultaneously reducing the direct adhesion forces that would otherwise transfer substrate roughness to the 2D material, thus achieving both flatness and adequate adhesion.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method significantly reduces the surface roughness of two-dimensional materials, resulting in extremely flat and smooth nano-sheets, facilitating their integration into semiconductor structures and devices like organic transistors.

Implementation Method 1

reducing adhesion forces and surface roughness by acting as a 'cushion' or 'soft landing pad'

Methodology Applied
Scientific EffectAdhesion forces: Adhesive

Data Source

PatentUS10369595B2Structure comprising a 2-dimensional material
Publication Date: 2019.08.06 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US10369595B2 patent drawing
  • US10369595B2 patent drawing
  • US10369595B2 patent drawing

AI summary

A semiconductor structure is provided including an electrically-conducting substrate and a layer of a two-dimensional material. The structure further includes a solid organic spacer layer arranged between the electrically-conducting substrate and the layer of the two-dimensional material.