2D Material Select Devices for Stacked Crossbar Memory

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Solution Overview

Problem

Conventional crossbar memory systems are limited by manufacturing constraints that restrict the fabrication of select devices during back-end of line (BEOL) processes, hindering the implementation of stacked configurations and limiting memory storage density per unit volume.

Innovation Solution

Implementing select devices constructed from 2D materials, such as graphene, MoO3, WO3, MoS2, MoSe2, WS2, and WSe2, which can be fabricated during BEOL processes, enabling the creation of stacked crossbar memory systems and enhancing memory storage density by utilizing van der Waals heterostructures and p-n diodes or transistors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional select devices (diodes/transistors) are used in crossbar memory systems, then manufacturing is limited to front-end of line processes, but this restricts the implementation of stacked configurations and reduces memory storage density per unit volume

Engineering Contradiction:
Improvemanufacturing flexibilityVSAvoidmemory storage density
Core Design Contradiction:
Ease of manufactureVSQuantity of substance

Solution Approach 1:

The patent changes the material parameter of select devices from conventional bulk materials to 2D materials (such as MoS2, WS2, MoSe2, WSe2, graphene). This material parameter change enables fabrication during back-end of line processes and allows implementation of stacked crossbar memory configurations, thereby resolving the contradiction between manufacturing flexibility and memory storage density.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent transitions from planar (2D) crossbar memory architecture to three-dimensional stacked crossbar memory architecture by using 2D material-based select devices. This dimensional change from single-layer to multi-layer stacking enables significantly higher memory storage density per unit volume while maintaining manufacturing feasibility through back-end of line process integration.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If conventional silicon-based MOSFETs are used as select devices, then fabrication is possible, but short-channel effects limit device performance and scalability

Engineering Contradiction:
Improvedevice performanceVSAvoidchannel length
Core Design Contradiction:
ReliabilityVSLength of moving object

Solution Approach 1:

The patent changes the physical parameter of the select device channel from conventional silicon-based bulk material to atomically thin 2D materials. This parameter change eliminates short-channel effects because the atomic-layer thickness provides superior electrostatic control, enabling reliable device performance even at extremely small channel lengths and allowing continued device scaling.

Inventive Principle:
Principle #35Parameter changes

3Quantity of substance

If stacked crossbar memory systems are implemented, then memory storage density per unit volume increases, but manufacturing complexity increases

Engineering Contradiction:
Improvememory storage densityVSAvoidmanufacturing complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent segments the crossbar memory system into multiple identical planar sub-systems that are stacked vertically. Each sub-system contains select devices made from 2D materials that can be fabricated using back-end of line processes. This segmentation approach allows complex 3D stacked structures to be built from simpler repeating units, reducing overall manufacturing complexity while achieving high memory storage density.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of 2D materials allows for the fabrication of select devices outside traditional manufacturing limitations, enabling the creation of stacked crossbar memory systems that significantly improve memory storage density per unit volume and overcome the short-channel effect limitations of conventional silicon-based MOSFETs.

Implementation Method 1

the at least one select device is a p-n diode that includes a van der Waals heterostructure and thereby includes a 2D material

Methodology Applied
Scientific Effectvan der Waals heterostructure: Van der Waals Force

Data Source

PatentUS10217798B2Systems and methods for implementing select devices constructed from 2D materials
Publication Date: 2019.02.26 INSTON
  • US10217798B2 patent drawing
  • US10217798B2 patent drawing
  • US10217798B2 patent drawing

AI summary

Systems and methods in accordance with embodiments of the invention implement select devices constructed from 2D materials. In one embodiment, a crossbar memory system includes: a first set of connection lines; a second set of connection lines; and an array of memory cells, each memory cell including: a select device; and a memory device; where each memory cell is coupled to a unique combination of: at least one connection line from the first set of connection lines, and at least one connection line from the second set of connection lines; and where at least one select device includes a 2D material.