2D Nanoparticle Motion Sensing via Planar Electrodes

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Solution Overview

Problem

Existing 3-D capacitive sensing techniques suffer from accuracy and performance issues due to their circular and out-of-plane structures, necessitating the development of alternative two-dimensional (2-D) capacitive sensing methods for effective material movement detection.

Innovation Solution

A 2-D capacitive sensing system comprising a two-dimensional electrode structure with integrated circuits to mitigate external interference and a data acquisition device, featuring conductive electrodes on parallel planes with dielectric materials in between, connected via conductive lines and vias, allowing for capacitive sensing and particle detection with enhanced accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If 3-D circular sensing structures are used, then the sensing coverage is increased, but the measurement precision and sensitivity are reduced

Engineering Contradiction:
Improvesensing coverageVSAvoidparticle detection accuracy
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The patent transitions from traditional 3-D circular sensing structures to a 2-D planar electrode configuration. This dimensional change enables the sensing structure to achieve both large sensing coverage and high measurement precision by arranging electrodes in parallel planes with controlled spacing, eliminating the geometric limitations of circular out-of-plane structures

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Device complexity

If 3-D out of plane sensing structures are used, then the structural simplicity is maintained, but cross-talk and physical interference increase

Engineering Contradiction:
Improvestructural simplicityVSAvoidcross-talk and physical interference
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The sensing structure is segmented into multiple parallel electrode planes with distinct functional zones. This segmentation isolates signal paths and reduces electromagnetic cross-talk between adjacent sensing regions while maintaining structural simplicity through standardized planar electrode patterns

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Dielectric materials are introduced as intermediaries between the parallel electrode planes to control and minimize physical interference and cross-talk. These dielectric layers provide electrical isolation while allowing capacitive coupling for sensing, effectively mediating the interaction between adjacent electrodes

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If integrated circuits are added to mitigate external interference, then the measurement precision is improved, but the device complexity increases

Engineering Contradiction:
Improvecapacitive sensing accuracyVSAvoidcircuit integration
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Multiple electrode planes and their associated readout circuits are merged into a single integrated circuit device. This integration consolidates what would otherwise be separate components, improving measurement precision through coordinated signal processing while minimizing the increase in overall device complexity through monolithic fabrication

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system minimizes cross-talk and physical interference, enabling the detection of particles down to 200 nm in size with improved sensitivity and accuracy, effectively addressing the limitations of existing 3-D sensing techniques.

Implementation Method 1

a (2-D) two-dimensional electrode structure, where the two-dimensional sensing structure includes a channel for capacitive sensing

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentUS10900884B22D nanoparticle motion sensing methods and structures
Publication Date: 2021.01.26 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US10900884B2 patent drawing
  • US10900884B2 patent drawing
  • US10900884B2 patent drawing

AI summary

A method, structure and system for capacitive sensing is provided. A system includes: a two-dimensional electrode structure, wherein the two-dimensional sensing structure includes a channel for capacitive sensing, at least one integrated circuit connected to the two dimensional sensing structure and configured to mitigate external interference associated with the capacitive sensing by i) receiving a input signal from the two-dimensional electrode structure or ii) providing a select signal to the two-dimensional structure, and a data acquisition device connected to the two-dimensional electrode structure via the integrated circuit configuration and configured to receive an output signal from the integrated circuit.