2D Area Sensor Feedback for Robot End Effector Positioning

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Solution Overview

Problem

Current robot systems lack precise feedback for positioning the end effector relative to a destination chamber, leading to inaccuracies due to aging mechanical structures and degradation, resulting in positioning errors and downtime for diagnostics.

Innovation Solution

A system that includes a light emitter attached to the destination chamber emitting a collimated light beam and a 2D area sensor on the end effector to detect the light beam's location, transmitting this data to a controller for precise positioning of substrates onto a substrate support, avoiding the need for lengthy diagnostics and improving accuracy beyond forward/inverse kinematics estimation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If forward/inverse kinematic processing is used to estimate end effector position, then the robot can operate without additional sensors, but positioning accuracy deteriorates due to aging mechanical structures and link degradation

Engineering Contradiction:

Improvepositioning accuracyVSAvoiddowntime for diagnostics

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent applies feedback by using a 2D area sensor to detect the actual position of the end effector and feeding this information back to the controller. The controller then uses this feedback to correct positioning errors in real-time, compensating for mechanical degradation without requiring downtime for diagnostics.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent replaces reliance on mechanical kinematic models with an optical measurement system. Instead of using forward/inverse kinematics calculations based on mechanical linkages, the system uses a 2D area sensor with light emitters to directly measure end effector position, substituting mechanical estimation with optical detection.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If the robot is taught or retrained to resolve positioning errors, then accuracy can be improved, but this causes downtime in substrate processing

Engineering Contradiction:

Improvesubstrate placement precisionVSAvoidsubstrate processing throughput

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The real-time feedback from the 2D area sensor allows the controller to continuously correct positioning errors during normal operation, eliminating the need to stop production for retraining or recalibration while maintaining high placement precision.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system performs self-correction of positioning errors through the feedback loop, where the 2D area sensor continuously monitors end effector position and the controller automatically adjusts for deviations, allowing the system to maintain accuracy without external intervention or downtime for diagnostics.

Inventive Principle:

Principle #25Self-service

3Measurement precision

If no sensor feedback is used, then the system remains simple without additional sensors, but positioning accuracy deteriorates with aging equipment

Engineering Contradiction:

Improveend effector position measurementVSAvoidsystem complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces a 2D area sensor as an intermediary measurement device that directly measures end effector position without requiring complex mechanical linkages or calibration procedures. This intermediary sensor provides high-precision measurements while adding relatively simple hardware compared to overhauling the mechanical system.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables precise and accurate placement of substrates within nanometer-level accuracy, reducing downtime and minimizing exposure to harsh processing conditions, while avoiding the need for special calibration discs or manual diagnostics.

Implementation Method 1

a light emitter attached to a destination chamber, the light emitter to emit a collimated light beam across an entrance to the destination chamber

Methodology Applied

Scientific EffectCollimated light beam: Laser

Implementation Method 2

The 2D area sensor is to detect a location of the collimated light beam incident on a surface of the 2D area sensor

Methodology Applied

Scientific EffectLight detection: Photoelectric Effect

Data Source

PatentUS11413767B2Sensor-based position and orientation feedback of robot end effector with respect to destination chamber

Publication Date: 2022.08.16 APPLIED MATERIALS INC

AI summary

A system includes a light emitter attached to a destination chamber, the light emitter to emit a collimated light beam across an entrance to the destination chamber. The system includes an end effector attached to a distal end of an arm of a robot. The system includes a two-dimensional (2D) area sensor disposed on the end effector at a location that coincides with the collimated light beam while the end effector reaches within the destination chamber. The 2D area sensor is to detect a location of the collimated light beam incident on a surface of the 2D area sensor and transmit, to a controller coupled to the robot, sensing data including the location.