2D Material Stack Alignment Using Angled Wall Cavities

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Solution Overview

Problem

The deposition of two-dimensional materials with control over crystalline structure, morphology, and material properties remains a challenge, and there is a need for methods and devices that can form stacks of two-dimensional materials with aligned crystal orientations to improve performance in electronic systems.

Innovation Solution

A method for forming a stack of two or more layers comprising a first layer of a two-dimensional material, where a flat surface and a set of walls are used to align the crystal structure of the two-dimensional material with a tolerance of up to 5°, allowing for the precise location and orientation of high-quality crystals on a substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional deposition methods are used for two-dimensional materials, then material deposition is achieved, but control over crystalline structure, morphology and material properties remains poor

Engineering Contradiction:
Improvecontrol over crystalline structureVSAvoiddeposition process complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The method performs preliminary alignment by forming walls at a specific angle adapted to align with the crystal structure of the two-dimensional material before deposition. This pre-established geometric framework guides the subsequent deposition process to achieve desired crystalline orientation and morphology control.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention changes the geometric parameter of the deposition structure by forming walls at a specific angle (adapted to align with crystal structure) rather than using conventional planar substrates. This parameter change in the deposition geometry directly influences the crystalline structure, morphology and material properties of the deposited two-dimensional material.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If stacks of two-dimensional materials are formed to improve performance, then device performance may be improved, but control over alignment and crystal orientation becomes more difficult

Engineering Contradiction:
Improvedevice performanceVSAvoidalignment control
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The method establishes preliminary alignment references by forming walls at angles adapted to the crystal structure before depositing each layer. This pre-established geometric framework ensures that subsequent layers can be aligned with controlled orientation relative to previous layers, maintaining crystallographic alignment throughout the stack formation process.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention uses specific geometric parameters (wall angles adapted to crystal structure) to control the orientation and alignment of each layer in the stack. By carefully controlling these geometric parameters during deposition, the method achieves precise alignment control throughout the multi-layer stacking process.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If precise location and orientation of high-quality crystals are achieved, then device performance is enhanced, but the deposition process becomes more complex

Engineering Contradiction:
Improveprecise location and orientationVSAvoiddeposition process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The method performs preliminary preparation by forming walls at specific angles adapted to the crystal structure before material deposition. This pre-established geometric framework serves as a template that guides crystal growth and orientation, enabling precise location and orientation control without requiring complex in-situ manipulation during deposition.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention changes the deposition geometry parameter by using angled walls instead of planar substrates. This geometric parameter change creates a controlled environment that naturally guides crystal orientation and location, achieving precise positioning through geometric constraints rather than complex process control.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the formation of stacks with unidirectional in-plane orientation of two-dimensional materials, facilitating the precise placement of high-quality crystals, which can enhance the performance and efficiency of electronic devices by preventing crystal grain boundaries and allowing control over stacking configuration and angle.

Implementation Method 1

a first layer formed of a two-dimensional material in physical contact with the flat surface and with both the first and second walls at the corner, wherein the angle is adapted to align with the crystal structure of the two-dimensional materials with a tolerance of up to 5°

Methodology Applied
Scientific EffectCrystal alignment through geometric constraints: Geometry

Data Source

PatentUS20250118553A12D Material Stack Formation
Publication Date: 2025.04.10 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • US20250118553A1 patent drawing
  • US20250118553A1 patent drawing
  • US20250118553A1 patent drawing

AI summary

A method for forming a stack including: a) providing: a flat surface, a first set of walls, comprising a first wall and a second wall, and meeting at a corner to form an angle, and a first layer formed of a two-dimensional material in physical contact with the flat surface and with both the first and second walls at the corner, wherein the angle aligns with the crystal structure of the two-dimensional material with a tolerance of up to 5°, wherein a top surface of the first layer is exposed, wherein each of the walls has a length of from 5 nm to 1000 nm, wherein a height of the walls, thereby forming a cavity delimited at least by the top surface and the first set of walls, then b) forming a second layer in the cavity and in physical contact with the exposed top surface of the first layer.