2T1R RRAM Cell Structure for Wide Operating Voltage Spans

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Solution Overview

Problem

The traditional 1T1R RRAM cell structure faces challenges with a wide voltage span for different operations, leading to compromised device reliability and increased cell area, which hinders high-density integration and industrial application.

Innovation Solution

A 2T1R cell structure is introduced, comprising two parallel-connected transistors with different electrical characteristics, each optimized for specific voltage requirements, and a resistive switching device, fabricated using standard CMOS processes to maintain cell area equivalence with traditional 1T1R cells.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a traditional 1T1R cell structure is used, then the cell area is small, but the voltage span for different operations is wide which compromises device reliability

Engineering Contradiction:
Improvecell areaVSAvoiddevice reliability
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The single transistor in the traditional 1T1R structure is segmented into two parallel transistors (T1 and T2) with different threshold voltages. T1 is optimized for high-voltage operations (forming/reset) while T2 is optimized for low-voltage operations (set/read), allowing each transistor to operate within its optimal voltage range and thereby improving overall device reliability without increasing cell area

Inventive Principle:
Principle #1Segmentation

2Reliability

If the voltage span for different operations is reduced, then device reliability improves, but cell area increases which hinders high-density integration

Engineering Contradiction:
Improvedevice reliabilityVSAvoidcell area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

Different regions of the transistor system are assigned different electrical characteristics: T1 has a higher threshold voltage (e.g., 2.5V) suitable for high-voltage forming/reset operations, while T2 has a lower threshold voltage (e.g., 1.5V) suitable for low-voltage set/read operations. This local differentiation of electrical properties allows the system to handle multiple voltage requirements without expanding the overall cell area

Inventive Principle:
Principle #3Local quality

3Device complexity

If a single transistor is used to control all operations, then the cell structure is simple, but the transistor must sacrifice performance for reliability due to wide voltage span requirements

Engineering Contradiction:
Improvecell structure complexityVSAvoidtransistor performance
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The control function is segmented from a single transistor into two specialized transistors working in parallel. This segmentation allows T1 to handle high-voltage forming/reset operations with optimized performance, while T2 handles low-voltage set/read operations, eliminating the need for a single transistor to compromise performance across a wide voltage span

Inventive Principle:
Principle #1Segmentation

4Reliability

If two transistors are added to the cell structure, then various voltage requirements can be met, but the cell area increases significantly

Engineering Contradiction:
Improvevoltage requirement satisfactionVSAvoidcell area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The two transistors T1 and T2 are merged into a parallel configuration sharing common source and drain regions, along with shared select lines (S1B and S2B). This merging approach allows both transistors to be integrated within the footprint of a traditional single-transistor cell, meeting various voltage requirements without significant area increase

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS12501627B2RRAM cell structure and fabrication method therefor
Publication Date: 2025.12.16 SHANGHAI INTEGRATED CIRCUIT EQUIPMENT & MATERIALS INDUSTRY INNOVATION CENTER CO LTD
  • US12501627B2 patent drawing
  • US12501627B2 patent drawing
  • US12501627B2 patent drawing

AI summary

The present invention disclosures a RRAM cell structure, comprising a first transistor and a second transistor which are connected in parallel and commonly connected to a resistive switching device; wherein, the first transistor is set with a first gate, a first source and a first drain, a first control signal is applied to the first gate, and a first source signal is applied to the first source; the second transistor is set with a second gate, a second source and a second drain, a second control signal is applied to the second gate, and a second source signal is applied to the second source; the first drain is connected with the second drain, which are commonly connected to one terminal of the resistive switching device, and a bit signal is applied to another terminal of the resistive switching device. The present invention uses cell area of a traditional 1T1R to manufacture a 2T1R cell structure, which can take into account various operating voltage requirements of the resistive switching device simultaneously, so as to significantly improve cell performances thereof.