3D Overhead Buffer Detection for FOUP Double-Entry Prevention
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Solution Overview
Problem
Current overhead buffer double-entry detection systems in semiconductor integrated circuit AMHS face issues with low precision due to missed and erroneous detections, particularly with small or transparent FOUPs, as photoelectric sensors struggle to accurately detect objects within the buffer.
Innovation Solution
An overhead buffer double-entry detection system employing a first sensing unit capable of scanning and generating detection data of a horizontal range, combined with a driving device to move the sensing unit in a vertical range, allowing for three-dimensional space detection and precise obstacle judgment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If photoelectric sensors are used for overhead buffer double-entry detection, then the detection system is simple and easy to operate, but the detection precision is low with missed and erroneous detections
Solution Approach 1:
The patent transitions from two-dimensional photoelectric sensor detection to three-dimensional detection by adding vertical movement capability to the sensing unit. The sensing unit moves along the vertical direction while scanning horizontal ranges, creating a three-dimensional detection space that accurately detects objects at different heights and positions within the overhead buffer, thereby resolving the low precision issue without excessive complexity increase
Solution Approach 2:
The detection space is divided into multiple horizontal ranges that are scanned sequentially. The sensing unit divides the detection task into segments by scanning different horizontal ranges at different vertical positions, allowing comprehensive coverage of the overhead buffer space while maintaining system manageability and precision
2Measurement precision
If photoelectric sensors are used for overhead buffer detection, then the system structure is simple, but the detection capability for small or transparent FOUPs is insufficient
Solution Approach 1:
By adding the vertical dimension to the detection system, the sensing unit can detect small or transparent FOUPs that may be missed by fixed photoelectric sensors. The vertical movement allows the sensing unit to scan at multiple heights, ensuring detection of objects regardless of their size or transparency properties
Solution Approach 2:
The sensing unit acts as an intermediary between the overhead hoist transport and the overhead buffer, providing enhanced detection capability. It serves as a mobile detection platform that can adapt to different detection needs while maintaining connection to the control system, resolving the limitation of fixed photoelectric sensors
Data Source
AI summary
An overhead buffer double-entry detection system, which includes an overhead hoist transport, a first sensing unit for scanning and generating detection data of a horizontal range, a driving device for moving the first sensing unit in a vertical range, a controlling unit, and an overhead hoist transport controlling system for sending a detection instruction and a driving instruction to the controlling unit when the overhead hoist transport moves to a corresponding overhead buffer position, whereby the controlling unit bases on the driving instruction to control the driving device to move the first sensing unit in a vertical range, bases on the detection instruction to control the first sensing unit to scan and generate detection data of each horizontal range within the overhead buffer during movement process, and bases on the detection data of each horizontal range within the overhead buffer to judge whether there is obstacle in the overhead buffer.