3D Capacitor Trench Layout With Gas Pockets for Stress Relief
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Solution Overview
Problem
Existing electronic devices with three-dimensional capacitors face challenges in manufacturing due to stress caused by filled cavities, leading to potential deformation and disruption in manufacturing processes, and there is a need for efficient stress absorption without affecting electrical functionality.
Innovation Solution
Incorporating trenches with gas pockets surrounding three-dimensional capacitors in an insulating layer, where the trenches are electrically insulated and designed to absorb stress, allowing for conformal extension of conductive layers within cavities while maintaining structural integrity and avoiding deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If three-dimensional capacitors are formed by filling cavities with conductive layers, then capacitance density is improved, but stress-induced deformation and manufacturing disruption occur
Solution Approach 1:
The device is segmented into capacitor regions (with filled cavities) and trench regions (with gas pockets). This segmentation allows different functional zones: capacitors achieve high density while trenches provide stress relief, preventing deformation and manufacturing disruption.
Solution Approach 2:
Gas pockets in trenches act as intermediary stress-absorbing elements between the filled capacitor cavities. These gas-filled spaces absorb mechanical stress without affecting the electrical functionality of the capacitors, preventing stress-induced deformation.
2Reliability
If gas pockets are incorporated in trenches surrounding capacitors, then stress absorption is improved, but device structure becomes more complex
Solution Approach 1:
The trench structure combines multiple functions: electrical insulation (isolating capacitors), stress absorption (via gas pockets), and structural support. By merging these functions into a single integrated feature, the overall device complexity is reduced despite the added functionality.
Solution Approach 2:
The trenches serve multiple purposes simultaneously: they provide electrical insulation between capacitors, absorb stress to prevent deformation, and maintain structural integrity. This multi-functionality reduces the need for separate components, offsetting the apparent structural complexity.
3Manufacturing precision
If trenches with gas pockets are added around capacitors, then stress-induced deformation is prevented, but manufacturing process complexity increases
Solution Approach 1:
The trenches with gas pockets are formed preliminarily during the manufacturing process, before final capacitor assembly. This preliminary action of creating stress-relief structures prevents deformation during subsequent manufacturing steps, ensuring precision without requiring additional corrective processes.
Data Source
AI summary
The present description concerns an electronic device comprising at least two three-dimensional capacitors, each capacitor being surrounded with a trench comprising a gas pocket.