3D Circuit Structure Reducing Line Width and Resistance

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Solution Overview

Problem

In display technology, reducing the size of pixel units to increase resolution is hindered by the inability to minimize metal wire size due to resistance issues, leading to reduced aperture ratios and potential substrate deformation from increased wire thickness.

Innovation Solution

A three-dimension circuit structure is designed with a substrate featuring a cavity, a first conductive layer covering the cavity's inside walls, and a filled material that differs from the conductive layers, allowing for a compact layout and reduced line width by utilizing the cavity to save layout area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If the size of metal wire is reduced to fit reduced-size pixel units, then the layout area is saved, but the resistance increases

Engineering Contradiction:
Improvelayout areaVSAvoidresistance
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent transitions from planar (2D) metal wire layout to three-dimensional (3D) conductive structure by forming conductive layers that extend vertically into the substrate. The first conductive layer is formed in a cavity and extends to the front surface, while the second conductive layer is formed over it, creating a stacked 3D configuration that reduces lateral footprint while maintaining conductive performance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nesting by placing the first conductive layer inside a cavity formed in the substrate, then embedding it within the second conductive layer. This nested arrangement allows multiple conductive elements to occupy overlapping spatial regions, effectively reducing the overall layout area while preserving electrical connectivity.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If the thickness of metal wire is increased to reduce resistance, then the resistance is reduced, but the substrate may be deformed

Engineering Contradiction:
ImproveresistanceVSAvoidsubstrate deformation
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

Instead of increasing metal wire thickness in the lateral plane, the patent utilizes the vertical dimension by forming conductive layers that extend into the substrate cavity. This 3D approach distributes the conductive material volume vertically rather than laterally, achieving low resistance without increasing surface footprint or causing substrate deformation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent applies local quality by concentrating conductive material specifically in the cavity region where it is most needed for electrical connectivity, rather than uniformly increasing metal wire thickness across the entire pixel unit. This localized approach reduces resistance where critical while maintaining substrate stability elsewhere.

Inventive Principle:
Principle #3Local quality

3Reliability

If the thickness of metal wire is increased to reduce resistance, then the resistance is reduced, but the process complexity increases

Engineering Contradiction:
ImproveresistanceVSAvoidprocess complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent segments the conductive structure into multiple distinct layers: the first conductive layer formed in the cavity, and the second conductive layer formed over it. This segmentation allows each layer to be optimized independently for its specific function, achieving low resistance through cumulative cross-sectional area while maintaining processability through standardized layer-by-layer fabrication.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS8933563B2Three-dimension circuit structure and semiconductor device
Publication Date: 2015.01.13 E INK HLDG INC
  • US8933563B2 patent drawing
  • US8933563B2 patent drawing
  • US8933563B2 patent drawing

AI summary

A three-dimension circuit structure includes a substrate, a first conductive layer, a filled material and a second conductive layer. The substrate has an upper surface and a cavity located at the upper surface. The first conductive layer covers the inside walls of the cavity and protrudes out the upper surface. The filled material fills the cavity and covers the first conductive layer. The second conductive layer covers the filled material and a portion of the first conductive layer, and the first conductive layer and the second conductive layer encapsulate the filled material. The material of the filled material is different from that of the first conductive layer and the second conductive layer.