3D Shape Measurement With Deflectometry for Tilted Mirror Surfaces
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Solution Overview
Problem
Existing methods for determining the three-dimensional shape of objects, such as devices on a substrate, face challenges in accurately measuring tilt angles due to mirror surfaces and generate noise in diffraction patterns, requiring large spaces and complicating equipment downsizing.
Innovation Solution
A detachable apparatus that uses pattern lights and deflectometry to determine the angle of an object's upper surface relative to a reference plane, incorporating a first light source, beam splitter, lenses, and processors to derive phase values from reflected lights, correcting the three-dimensional shape based on tilt angles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a camera and laser range finder are combined to measure both color information and distance, then comprehensive three-dimensional shape information can be obtained, but the device complexity and cost increase significantly
Solution Approach 1:
The patent divides the three-dimensional measurement task into two separate stages: first capturing two-dimensional color image data with a camera, then measuring distance data using a laser range finder. This segmentation allows each device to perform its specialized function independently, avoiding the need for a complex integrated system while achieving comprehensive three-dimensional measurement capabilities through sequential data acquisition and processing
Solution Approach 2:
The patent introduces an intermediary processing step where two-dimensional image data from the camera is converted into three-dimensional virtual space data before being combined with distance measurements from the laser range finder. This intermediary transformation enables the integration of data from separate devices, allowing comprehensive three-dimensional shape determination without requiring a directly integrated complex sensor system
2Loss of information
If multiple measurement devices are integrated to obtain comprehensive object data, then measurement completeness improves, but the time required for data acquisition and processing increases
Solution Approach 1:
The patent performs preliminary action by first capturing the two-dimensional color image data with the camera before conducting laser range finder measurements. This sequential approach allows the system to establish the basic object boundaries and features first, then efficiently acquire distance data only for relevant areas, reducing overall data acquisition time while maintaining information completeness
Solution Approach 2:
The patent applies partial action by focusing laser range finder measurements on specific regions of interest identified from the preliminary two-dimensional image data, rather than performing exhaustive measurements across the entire measurement space. This selective approach reduces data acquisition time while ensuring all necessary three-dimensional shape information is captured
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise determination of three-dimensional shapes and angles, facilitating equipment miniaturization by reducing noise and improving accuracy in tilt measurements.
Implementation Method 1
a beam splitter and one or more lenses configured to change optical paths of the one or more first pattern lights so that a beam of light corresponding to a respective phase of the phase range spreads, and arrives at each point of a partial region of the upper surface of the object
Implementation Method 2
first information on one or more first reflected lights generated by reflecting the one or more first pattern lights from the partial region
Data Source
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AI summary
The present disclosure proposed a detachable second apparatus coupled to a first apparatus that determines a first three-dimensional shape of an object located on a reference plane, and configured to determine an angle of an upper surface of the object with respect to the reference plane, the second apparatus comprising: a first light source configured to sequentially irradiate one or more first pattern lights having one phase range; a beam splitter and one or more lenses configured to change optical paths of the one or more first pattern lights so that a beam of light corresponding to a respective phase of the phase range spreads, and arrives at each point of a partial region of the upper surface of the object; a communication interface configured to communicate with the first apparatus; and a first processor that is electrically connected to the first light source and the communication interface, and that is configured to: obtain, from the first apparatus, first information on one or more first reflected lights generated by reflecting the one or more first pattern lights from the partial region; generate second information indicating the angle of the upper surface with respect to the reference plane based on the first information; and control the communication interface to obtain the first three-dimensional shape of the object based on each of phase changes of one or more second reflected lights from one or more second pattern lights, wherein the first information includes information indicating each light amount value of the one or more first reflected lights, and wherein the second information is used to determine a second three-dimensional shape of the object by correcting the upper surface of the object indicated by the first three-dimensional shape.