3D Die Array Packaging With Hybrid Bonding for High I/O Density

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Solution Overview

Problem

As semiconductor technologies advance, integrated circuit dies become smaller with increased functions, leading to a higher density of input/output (I/O) pads, which complicates packaging due to reduced available area, necessitating innovative packaging solutions to enhance parallel processing capabilities.

Innovation Solution

The formation of a system-on-integrated-chip (SoIC) device by stacking die arrays in a checkerboard pattern, allowing for a three-dimensional die network with logic and memory dies intermingled, utilizing hybrid bonding for electrical connections without solder, to increase packing density and improve memory access speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If integrated circuit dies are made smaller with increased functions, then the number of I/O pads needed increases, but the area available for I/O pads decreases

Engineering Contradiction:
Improvenumber of I/O padsVSAvoidarea available for I/O pads
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The patent transitions from two-dimensional planar packaging to three-dimensional stacked packaging. Multiple dies are vertically stacked and interconnected, allowing I/O pads to be distributed across multiple layers and surfaces. This dimensional change enables significantly more I/O pads to be accommodated within a reduced footprint area by utilizing the vertical dimension for additional connection points and redistribution.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If multiple dies are integrated to increase parallel processing capabilities, then computing efficiency improves, but packaging complexity increases

Engineering Contradiction:
Improveparallel processing capabilitiesVSAvoidpackaging complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system is divided into multiple discrete dies that can be independently manufactured, tested, and then stacked. Each die is a separate functional unit that can be optimized independently. This segmentation allows for modular assembly and simplifies the packaging process by breaking down the complex multi-die integration into manageable stages of individual die preparation and subsequent stacking.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple dies are nested vertically in a stacked configuration, with each die containing functional elements that interconnect with adjacent dies. This nesting approach consolidates multiple processing units into a compact vertical structure, increasing parallel processing capability while managing packaging complexity through hierarchical organization of die layers and their interconnections.

Inventive Principle:
Principle #7Nested doll (Nesting)

Data Source

PatentUS20240379619A1Integrated circuit packages
Publication Date: 2024.11.14 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240379619A1 patent drawing
  • US20240379619A1 patent drawing
  • US20240379619A1 patent drawing

AI summary

In an embodiment, a device includes: a first die array including first integrated circuit dies, orientations of the first integrated circuit dies alternating along rows and columns of the first die array; a first dielectric layer surrounding the first integrated circuit dies, surfaces of the first dielectric layer and the first integrated circuit dies being planar; a second die array including second integrated circuit dies on the first dielectric layer and the first integrated circuit dies, orientations of the second integrated circuit dies alternating along rows and columns of the second die array, front sides of the second integrated circuit dies being bonded to front sides of the first integrated circuit dies by metal-to-metal bonds and by dielectric-to-dielectric bonds; and a second dielectric layer surrounding the second integrated circuit dies, surfaces of the second dielectric layer and the second integrated circuit dies being planar.