3D Die Stack Redistribution Layer for Backside Power Delivery

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Solution Overview

Problem

Current package architectures for integrated circuit devices face challenges in meeting the increasing power and compute bandwidth demands of CPUs and GPUs, particularly in providing efficient power delivery and input/output routing, which limits performance and efficiency.

Innovation Solution

A multichip composite architecture is introduced, featuring a topside metallization network that routes power directly to the backside of integrated circuit dies, utilizing a thick metal redistribution layer on top of compute dies, which includes a disaggregated voltage regulator to improve power delivery and reduce routing constraints.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If current package architectures are used for power delivery, then existing routing structures are maintained, but power efficiency deteriorates and IR drop increases under high power demands

Engineering Contradiction:
Improvepower efficiencyVSAvoidIR drop
Core Design Contradiction:
Use of energy by moving objectVSLoss of energy

Solution Approach 1:

The patent introduces a third-dimensional vertical power delivery pathway by stacking multiple die layers with metallization networks on each layer. Power is delivered vertically through through-silicon vias (TSVs) and backside metallization, transitioning from traditional planar 2D routing to 3D vertical routing, which reduces current path length and associated IR drops

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The power delivery network is segmented into multiple functional layers: frontside metallization for signal routing, backside metallization for power distribution, and intermediate redistribution layers. This segmentation allows optimized power pathways separate from signal routing, improving power efficiency and reducing interference

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If traditional routing structures are used, then existing die layouts are maintained, but compute area is reduced due to routing restrictions

Engineering Contradiction:
Improvecompute areaVSAvoidrouting restrictions
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

By implementing backside metallization and vertical through-silicon via connections, the patent moves power and ground routing to the third dimension, freeing up the frontside die surface from extensive power routing traces. This allows significantly more compute area on the frontside while maintaining power delivery capability through vertical pathways

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The power delivery function is extracted from the frontside metallization network and relocated to dedicated backside metallization layers. This separation removes routing restrictions from the compute area, allowing uninterrupted frontside layout optimization for computational elements

Inventive Principle:
Principle #2Taking out (Extraction)

3Use of energy by moving object

If power delivery is improved through enhanced routing, then power efficiency increases, but device complexity increases

Engineering Contradiction:
Improvepower efficiencyVSAvoidmultichip composite architecture
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The backside metallization network serves multiple functions simultaneously: power distribution, ground return paths, and thermal management. The through-silicon vias serve dual purposes as both electrical interconnects and structural alignment features. This multi-functionality reduces the need for separate dedicated structures, managing complexity while achieving superior power delivery

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentEP4618152A13D die stack redistribution layer for topside power delivery to backside die metallization in multichip composite devices
Publication Date: 2025.09.17 INTEL CORP
  • EP4618152A1 patent drawingFigure 1~2
  • EP4618152A1 patent drawingFigure 3
  • EP4618152A1 patent drawingFigure 4

AI summary

Microelectronic devices, assemblies, and systems include a multichip architecture having one or more integrated circuit dies over and bonded to a base die, and a metallization network over the integrated circuit die(s). A backside metallization of the integrated circuit die(s) is proximal to the metallization network and a frontside metallization of the integrated circuit die(s) is opposite a device layer from the backside metallization. A via lateral to the base die couples to the metallization network to provide an electrical routing to the backside metallization of the integrated circuit die(s) through the via and the metallization network.