3D Solid Electrolyte Capacitor With Partial-Conformal Electrolyte
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Solution Overview
Problem
The challenge in fabricating high-capacitance solid-state electrolyte capacitors lies in achieving conformality of the solid-state electrolyte layer in three-dimensional structures with high aspect ratios, leading to inhomogeneous deposition, defects, and increased process costs due to the need for precise control and longer deposition times.
Innovation Solution
A method involving the formation of a solid-state electrolyte layer that is only partially conformal to the electrode layer, combined with an ultra-thin dielectric layer, reduces fabrication time and costs while allowing for thicker electrolyte deposition in high aspect ratio structures, mitigating defects and enhancing capacitance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If the thickness of the solid-state electrolyte layer is decreased to increase power density and frequency response, then capacitance performance is improved, but manufacturing precision deteriorates due to difficulty in achieving conformal deposition in high aspect ratio structures
Solution Approach 1:
The solid-state electrolyte layer is segmented into multiple sub-layers deposited in sequential steps. Each sub-layer is deposited with controlled thickness, allowing the precursor to penetrate and react uniformly throughout the high aspect ratio porous structure. This stepwise approach overcomes the limitation of single-step deposition where the precursor cannot reach deep pores uniformly, thereby achieving conformal coverage even at reduced overall thickness.
Solution Approach 2:
The deposition process uses periodic alternation between precursor introduction and purging cycles. This periodic action allows the precursor to diffuse into the porous structure during introduction phases and be removed during purging phases, enabling uniform reaction throughout the high aspect ratio structure. The cyclic nature of this process ensures consistent thickness distribution across the entire electrolyte layer.
2Quantity of substance
If conventional dielectric materials are used to increase capacitance by decreasing thickness, then capacitance value is improved, but manufacturing difficulty increases drastically due to geometric constraints of 3D architecture
Solution Approach 1:
The invention employs a porous solid-state electrolyte material instead of conventional dense dielectric materials. The porous structure allows the electrolyte precursor to penetrate deep into the 3D architecture during deposition, achieving conformal coating in high aspect ratio structures. This porous approach enables capacitance enhancement through increased surface area while maintaining ease of manufacture through standard ALD processes.
Solution Approach 2:
The solid-state electrolyte is formulated as a composite material with specific porous structure and chemical composition that enables both high capacitance and easy deposition. The composite nature allows optimization of pore size, surface area, and chemical reactivity to facilitate uniform precursor penetration and reaction, solving the manufacturing difficulty associated with thick 3D structures.
3Quantity of substance
If the aspect ratio of the PAA region is increased to increase capacitance density, then capacitance density is improved, but deposition uniformity deteriorates leading to inhomogeneous electrolyte layer
Solution Approach 1:
The electrode layer is formed first as a preliminary structure that provides a uniform foundation for subsequent electrolyte deposition. This preliminary electrode layer ensures that the precursor has a consistent starting point for penetration, improving uniformity even in high aspect ratio structures. The electrode acts as a template that guides uniform electrolyte formation throughout the porous structure.
Solution Approach 2:
The deposition process uses excessive precursor introduction time or multiple deposition cycles to ensure complete penetration into high aspect ratio structures. By providing more precursor exposure time than theoretically minimum, the process ensures uniform coverage throughout the entire pore depth, achieving both high capacitance density and deposition uniformity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in reduced defects, lower fabrication costs, and increased capacitance density, with the dielectric layer ensuring stability and preventing breakdowns, while maintaining comparable performance to conventional capacitors.
Implementation Method 1
energy is stored via accumulation of mobile charges (e.g., ions such as Li+, Na+, etc.) at the electrolyte/electrode interfaces through electrostatic and/or redox reactions
Implementation Method 2
energy is stored via accumulation of mobile charges (e.g., ions such as Li+, Na+, etc.) at the electrolyte/electrode interfaces through electrostatic and/or redox reactions
Implementation Method 3
the deposition of the solid-state electrolyte layer 110 is typically done using Atomic Layer Deposition (ALD) to ensure conformality of the solid-state electrolyte layer 110 to the shape of the PAA region 106
Data Source
AI summary
A method of fabricating a capacitor that includes: forming a three-dimensional structure over a substrate, the three-dimensional structure having a region with elongated pores extending towards the substrate from a top surface of the three-dimensional structure remote from the substrate or elongated columns extending away from the substrate towards the top surface of the three-dimensional structure remote from the substrate; forming a first electrode layer over a surface of the region of the three-dimensional structure, the first electrode conformal to the surface of the region; forming an intermediate layer over the first electrode layer; and forming a second electrode layer over the intermediate layer, the second electrode layer conformal to the intermediate layer, wherein forming the intermediate layer includes: forming a solid-state electrolyte layer partially conformal to the first electrode layer; and forming a dielectric layer conformal to the first electrode layer.