3D Flash Memory With P-Type Source/Drain Pillars

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Solution Overview

Problem

Current 3D flash memory technologies face challenges in achieving high integration and efficient operation speed while minimizing the risk of over erasing, which affects data storage reliability and processing time.

Innovation Solution

The proposed 3D flash memory design includes a gate stack structure, annular channel pillar, and source/drain pillars with a charge storage structure between gate layers and the channel pillar, allowing for high integration and efficient operation with P-type doped source/drain pillars that eliminate the concern of over erasing, enabling one-shot pulse erase operations and reduced processing time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional 3D flash memory structures are used, then integration can be achieved, but over erasing occurs affecting data storage reliability

Engineering Contradiction:
Improvedata storage reliabilityVSAvoidover erasing
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies local quality by using P-type doped source/drain pillars specifically in regions where over-erasing occurs, while maintaining N-type doping in other critical regions. This localized doping strategy addresses the over-erasing problem in specific areas without compromising the overall memory operation, thereby improving data storage reliability while eliminating the harmful over-erasing effect.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the doping type parameter from conventional N-type to P-type in the source/drain pillars. This parameter change fundamentally alters the electrical characteristics of the memory cell, enabling one-shot pulse erase operations that completely eliminate over-erasing issues and improve data storage reliability through clearer threshold voltage distinctions.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If conventional flash memory operation is used, then data can be stored, but processing time is increased

Engineering Contradiction:
Improveprocessing speedVSAvoidprocessing time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The patent implements periodic action through one-shot pulse erase operations that use precisely timed voltage pulses to erase memory cells. This approach replaces continuous or multi-step erase processes with single, periodic pulses, significantly reducing processing time while maintaining complete erase effectiveness and improving overall productivity.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

By changing the doping parameter to P-type, the patent enables faster erase operations through one-shot pulses. The altered electrical characteristics allow for quicker charge removal and threshold voltage switching, directly reducing processing time and increasing memory operation speed.

Inventive Principle:
Principle #35Parameter changes

3Area of stationary object

If integration is increased, then area utilization improves, but over erasing risk increases

Engineering Contradiction:
Improvearea utilizationVSAvoidover erasing
Core Design Contradiction:
Area of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The patent maintains high area utilization through compact 3D flash memory structure while applying P-type doping locally to counteract over-erasing effects that become more pronounced in highly integrated arrays. This localized quality adjustment allows dense packing without proportionally increasing over-erasing risks.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The P-type doping parameter change fundamentally resolves the over-erasing issue even in highly integrated structures. The modified electrical characteristics provide better control over charge removal processes, allowing area utilization to increase without proportionally increasing over-erasing risks.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances data storage reliability and processing speed by ensuring no leakage current during programming and erasing, with a clear threshold voltage difference for data read operations, thus improving overall memory unit performance and integration.

Implementation Method 1

a charge storage structure (112) disposed between each of the plurality of gate layers and the annular channel pillar

Methodology Applied
Scientific EffectElectrical charge storage: Capacitance

Implementation Method 2

ensuring no leakage current during programming and erasing

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11765901B23D flash memory and operation method thereof
Publication Date: 2023.09.19 MACRONIX INTERNATIONAL CO LTD
  • US11765901B2 patent drawing
  • US11765901B2 patent drawing
  • US11765901B2 patent drawing

AI summary

Disclosed is 3D flash memory comprises a gate stack structure, an annular channel pillar, a first source/drain pillar, a second source/drain pillar and a charge storage structure. The gate stack structure is disposed on a dielectric base, and comprising a plurality of gate layers electrically insulated from each other. The annular channel pillar is disposed on the dielectric base and penetrating through the gate stack structure. The first source/drain pillar and the second source/drain pillar, disposed on the dielectric base, located within the annular channel pillar and penetrating through the gate stack structure, wherein the first source/drain pillar and the second source/drain pillar are separated from each other and are each connected to the annular channel pillar. The charge storage structure is disposed between each of the plurality of gate layers and the annular channel pillar. The first source/drain pillar and the second source/drain pillar are P-type doped.