3D Fuse Architectures for Area Reduction and Soft Error Resistance

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Solution Overview

Problem

Two-dimensional fuse architectures face challenges in efficiently integrating fuse arrays and fuse circuitry on a semiconductor substrate, leading to complex designs, increased area usage, and vulnerability to soft errors.

Innovation Solution

The implementation of three-dimensional fuse architectures, where fuse arrays and fuse circuitry are configured with a substrate, allowing for overlapping structures and simpler latches, reducing area usage and minimizing soft error risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If two-dimensional fuse architectures are used, then fuse arrays and fuse circuitry can be integrated on a semiconductor substrate, but the design becomes complex and area usage increases

Engineering Contradiction:
Improveintegration of fuse arrays and fuse circuitryVSAvoiddesign complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent transitions from a two-dimensional fuse architecture to a three-dimensional fuse architecture. The fuse array is arranged in multiple stacked layers on the semiconductor substrate, with fuse circuitry positioned between the layers. This vertical stacking enables efficient integration while maintaining simpler circuit designs, as the three-dimensional arrangement naturally reduces the need for complex broadcast and load schemes required in planar designs.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If two-dimensional fuse architectures are used, then fuse arrays and fuse circuitry can be integrated on a semiconductor substrate, but area usage increases

Engineering Contradiction:
Improveintegration of fuse arrays and fuse circuitryVSAvoidsubstrate area usage
Core Design Contradiction:
Ease of manufactureVSArea of stationary object

Solution Approach 1:

The patent transitions from a two-dimensional fuse architecture to a three-dimensional fuse architecture. The fuse array is arranged in multiple stacked layers on the semiconductor substrate, with fuse circuitry positioned between the layers. This vertical stacking enables efficient integration while maintaining simpler circuit designs, as the three-dimensional arrangement naturally reduces the need for complex broadcast and load schemes required in planar designs.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested structure where fuse circuitry is positioned between stacked layers of fuse arrays. The first fuse array layer is positioned above the semiconductor substrate, with fuse circuitry disposed between the substrate and the first layer. A second fuse array layer can be positioned above the first layer, creating a nested, space-efficient configuration that maximizes substrate utilization while minimizing overall area usage.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Ease of manufacture

If two-dimensional fuse architectures are used, then fuse arrays can be integrated on a semiconductor substrate, but vulnerability to soft errors increases

Engineering Contradiction:
Improveintegration of fuse arrays on substrateVSAvoidsoft error vulnerability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent transitions from a two-dimensional fuse architecture to a three-dimensional fuse architecture. The fuse array is arranged in multiple stacked layers on the semiconductor substrate, with fuse circuitry positioned between the layers. This vertical stacking enables efficient integration while maintaining simpler circuit designs, as the three-dimensional arrangement naturally reduces the need for complex broadcast and load schemes required in planar designs.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent divides the fuse array into multiple separate stacked layers rather than using a single planar layer. This segmentation into first and second fuse array layers, with fuse circuitry positioned between them, creates physically separated fuse structures. This spatial separation reduces the impact of soft errors, as errors affecting one layer are less likely to propagate to other layers, thereby improving overall reliability.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11502089B2Three-dimensional fuse architectures and related systems, methods, and apparatuses
Publication Date: 2022.11.15 MICRON TECHNOLOGY INC
  • US11502089B2 patent drawing
  • US11502089B2 patent drawing
  • US11502089B2 patent drawing

AI summary

Apparatuses, methods, and computing systems relating to three-dimensional fuse architectures are disclosed. An apparatus includes a semiconductor substrate, a fuse array on or in the semiconductor substrate, and fuse circuitry on or in the semiconductor substrate. The fuse array includes fuse cells. The fuse circuitry is configured to access the fuse cells. The fuse circuitry is offset from the fuse array such that the fuse circuitry is disposed between the semiconductor substrate and the fuse array, or the fuse array is disposed between the semiconductor substrate and the fuse circuitry.