3D Hall Sensor Offset Cancellation via Segmented Shell
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional Hall effect devices suffer from offset errors, particularly residual offset errors, when detecting magnetic field components in 3D space, limiting their magnetic sensitivity and accuracy.
Innovation Solution
A 3-dimensional Hall sensor device with a Hall effect region implemented in a 3-dimensional shell, featuring multiple terminals and a sensor circuit that operates in multiple phases to combine electrical output quantities for dynamic offset cancellation, enhancing magnetic sensitivity and reducing residual offset errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional Hall effect devices are used to detect magnetic field components in 3D space, then the device structure is simple, but the residual offset error is high and magnetic sensitivity is limited
Solution Approach 1:
The Hall sensor element is divided into multiple independent sensing regions (first Hall sensor element and second Hall sensor element) with different orientations. Each region detects magnetic field components along different axes, and the signals are combined to achieve 3D magnetic field detection while canceling offset errors through differential measurement.
Solution Approach 2:
The invention transitions from conventional 2D Hall effect devices to a 3D configuration by stacking multiple Hall sensor elements at different orientations (e.g., 0° and 90°) and combining their outputs. This dimensional approach enables detection of magnetic field components in three-dimensional space while using offset cancellation algorithms to eliminate residual errors.
2Reliability
If multi-contact Hall sensor is used with spinning current mode, then offset error is reduced, but residual offset error remains high (about 1 mT)
Solution Approach 1:
Multiple Hall sensor elements with different orientations are merged into a single integrated sensor device. The signals from each element are combined through a signal processing circuit that applies offset cancellation algorithms, achieving residual offset errors below 1 mT by leveraging the complementary nature of the different orientations.
Solution Approach 2:
The system implements feedback-based offset cancellation where the output signals from multiple Hall sensor elements are continuously monitored and processed. The signal processing circuit dynamically adjusts and combines the signals to cancel residual offset errors, maintaining high measurement precision throughout operation.
3Ease of manufacture
If conventional 2D Hall plates are used, then manufacturing is simple, but magnetic sensitivity to 3D field components is limited
Solution Approach 1:
The Hall sensor element is segmented into multiple sensing regions with different orientations, allowing each region to detect specific magnetic field components. This segmentation enables 3D magnetic field detection capability while maintaining compatibility with conventional semiconductor manufacturing processes through standard lithography and deposition techniques.
Solution Approach 2:
The invention adds a vertical dimension to conventional 2D Hall plates by stacking multiple sensing elements at different orientations in the thickness direction of the semiconductor substrate. This 3D configuration enables detection of magnetic field components along all three axes while being fabricated using standard planar semiconductor processing methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly improves magnetic sensitivity and reduces residual offset errors, enabling more accurate detection of magnetic field components in 3D space while maintaining large magnetic sensitivity.
Implementation Method 1
Hall effect devices are semiconductor devices used to measure magnetic field. They produce an output signal proportional to magnetic field.
Data Source
AI summary
The present disclosure relates to 3-dimensional Hall sensor devices comprising a Hall sensor element having a Hall effect region implemented in a 3-dimensional shell and comprising at least three terminals. Each terminal is connected to at least one electrical contact of the Hall effect region and each electrical contact is disposed at a different region of the 3-dimensional shell. The present disclosure further discloses spinning current/voltage schemes for offset cancellation in such 3-dimensional Hall sensor devices.