3D IC Stack Edge Interconnects for Routing and Heat Dissipation
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Solution Overview
Problem
Existing 3D ICs face scalability issues due to single-sided interconnects, limiting power and signal distribution, and heat dissipation, which are not scalable with the number of vertically stacked dies, hindering PPAC optimization.
Innovation Solution
Implementing a 3D IC stack with interconnects on four sidewalls, using RDL structures and thermal conductivity layers to enable multi-sided signal and power distribution, and enhanced heat dissipation without increasing footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If single-sided interconnects are used in 3D ICs, then device complexity is reduced, but power and signal distribution capability deteriorates
Solution Approach 1:
The patent transitions from single-sided (one-dimensional) interconnects to multi-sided (four-dimensional) interconnects by adding interconnect structures on all four sidewalls of the IC stack. This dimensional expansion enables power and signal distribution to reach all dies in the stack from multiple directions, dramatically improving distribution capability without proportionally increasing complexity.
Solution Approach 2:
The sidewall interconnect structures serve multiple functions simultaneously: they provide power distribution, signal routing, and thermal management pathways. Each sidewall interconnect layer can carry different signals and power levels, making the interconnect system highly versatile and adaptable to various die configurations.
2Ease of manufacture
If single-sided interconnects are used in 3D ICs, then manufacturing process is simplified, but heat dissipation capability deteriorates
Solution Approach 1:
The patent adds thermal management pathways in the lateral dimensions by implementing thermal vias and heat dissipation structures on all four sidewalls. This transforms the thermal management from a single-direction (bottom-to-top) approach to a multi-directional approach, enabling heat to escape through multiple pathways and significantly improving heat dissipation capability.
Solution Approach 2:
The patent introduces thermal vias and heat dissipation layers as intermediary structures between the active dies and the heat sink. These intermediary thermal management structures facilitate efficient heat transfer from the densely packed dies through the sidewalls to external cooling systems, acting as a bridge between the heat-generating components and the thermal management system.
3Adaptability or versatility
If multi-sided interconnects are implemented, then power and signal distribution is enhanced, but device complexity increases
Solution Approach 1:
The patent divides the interconnect system into multiple independent sidewall interconnect layers, each handling specific power or signal routing functions. This segmentation allows each layer to be optimized independently and simplifies the overall design by breaking down the complex multi-sided interconnect problem into manageable modular components that can be stacked and combined systematically.
Solution Approach 2:
The patent applies different interconnect configurations to different sidewalls based on local requirements. Each sidewall can have customized interconnect densities, material compositions, and routing patterns optimized for its specific functional needs, allowing the system to achieve high versatility without uniformly increasing complexity across the entire structure.
4Adaptability or versatility
If multi-sided interconnects are implemented, then design flexibility is increased, but manufacturing complexity increases
Solution Approach 1:
The patent incorporates interconnect structures on all four sidewalls during the initial wafer fabrication process, before the IC stack is assembled. This preliminary formation of sidewall interconnects eliminates the need for complex post-assembly wiring operations and allows for precise alignment and integration. The interconnect structures are pre-configured with appropriate materials and geometries to match the specific die stack requirements.
Solution Approach 2:
The patent utilizes standard semiconductor manufacturing parameters and materials that can be adjusted to achieve different interconnect configurations. By changing parameters such as metal layer thickness, via dimensions, and material composition within existing process capabilities, the system achieves high design flexibility without requiring fundamentally new manufacturing techniques or equipment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances power and signal routing, improves performance, and increases design flexibility in 3D ICs by allowing efficient interconnect strategies across multiple dies.
Implementation Method 1
an upward extending thermal conductivity layer between two adjacent IC structures. The thermal conductivity of the upward extending thermal conductivity layer is higher than that of Si
Data Source
AI summary
An IC stack includes: a plurality of integrated circuit (IC) structure horizontally separate with each other, wherein each IC structure comprises a top surface, a bottom surface opposite to the top surface, and four sidewalls with a first sidewall, a second sidewall, a third sidewall and a fourth sidewall; wherein the area of the bottom surface or the top surface is larger than that of any sidewall; a laterally extending RDL structure covering each first sidewall of the plurality of IC structures; and an upward extending thermal conductivity layer between two adjacent IC structures. The thermal conductivity of the upward extending thermal conductivity layer is higher than that of Si.


