3D IC Thermal Interface Layout for Hotspot Reduction

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Solution Overview

Problem

Three-dimensional integrated circuits face significant thermal management challenges due to low thermal conductivity of dielectric materials, leading to thermal hotspots and performance issues, which existing technologies have not adequately addressed.

Innovation Solution

The design and optimization of a 3D integrated circuit device incorporating a substrate, thermal interface layer, device layers, heat spreader, and heat sink, with high conductivity inserts such as Boron Arsenide, arranged in specific configurations to enhance heat transfer and cooling performance, including ring and blade configurations to optimize the distribution of high conductivity materials within the heat spreader.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional 2D integrated circuit architectures are used, then manufacturing and thermal management are simpler, but resistive-capacitive delay increases and thermal hotspots develop due to low thermal conductivity of dielectric materials

Engineering Contradiction:
Improvecircuit performanceVSAvoidthermal hotspot temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The patent transitions from 2D to 3D integrated circuit architecture by stacking multiple device layers vertically and interconnecting them through through-silicon vias (TSVs). This dimensional change reduces resistive-capacitive delay by shortening signal paths and improves thermal management by enabling heat dissipation in the vertical direction through heat sinks attached to the stacked structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent introduces copper interconnect layers and TSVs as intermediary elements between device layers. These copper structures serve dual purposes: electrical interconnection to reduce resistive-capacitive delay and thermal conduction pathways to transport heat away from hotspots, acting as mediators between electrical and thermal management functions.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If 3D integrated circuit stacking is implemented, then circuit performance improves and footprint reduces, but thermal management complexity increases due to heat generation in multiple stacked layers

Engineering Contradiction:
Improvecircuit performanceVSAvoidthermal management structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent designs copper TSVs and interconnect structures to perform multiple functions simultaneously: electrical signal transmission between stacked device layers and thermal conduction to transport heat from upper layers to heat sinks. This multi-functionality reduces thermal management complexity by eliminating the need for separate thermal pathways.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The stacked 3D IC structure utilizes its own vertical architecture and copper interconnect infrastructure to manage heat internally. The same TSVs and interconnect layers that enable high-performance circuit operation also serve as thermal conduction pathways, allowing the device to self-manage thermal issues without external thermal management components.

Inventive Principle:
Principle #25Self-service

3Temperature

If heat sink size is increased to improve cooling, then thermal management performance improves, but device footprint increases

Engineering Contradiction:
Improvemaximum temperature reductionVSAvoidheat sink area
Core Design Contradiction:
TemperatureVSArea of stationary object

Solution Approach 1:

The patent attaches heat sinks to the vertical bottom surface of the stacked 3D IC structure, utilizing the z-dimension for heat dissipation. This vertical heat sink configuration allows effective cooling with a smaller planar footprint compared to traditional lateral heat spreaders, as heat is dissipated in the vertical direction away from the chip area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs copper TSVs and interconnect structures with high thermal conductivity to create efficient thermal pathways from the device layers to the heat sink. These copper structures form a composite thermal management system that maximizes heat transfer efficiency, allowing smaller heat sink areas to achieve the same cooling effect.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces the maximum temperature of the 3D IC by up to 10% and allows for a larger heat sink and heat spreader size, improving thermal management and cooling performance while maintaining a compact footprint.

Implementation Method 1

the thermal interface layer enhances conductive heat transfer between the at least one device layer and the at least one die

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a heat sink located adjacent to a heat spreader

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

the heat sink can include a coolant entrance and at least one coolant exit, wherein a coolant enters the heat sink through the coolant entrance and exits the heat sink through the at least one coolant exit

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 4

the heat spreader can comprise a high conductivity insert

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS11942453B2Thermal management of three-dimensional integrated circuits
Publication Date: 2024.03.26 ANTONINUS THERMAL MANAGEMENT LLC
  • US11942453B2 patent drawing
  • US11942453B2 patent drawing
  • US11942453B2 patent drawing

AI summary

A 3D integrated circuit device can include a substrate, a thermal interface layer and at least one die, at least one device layer bonded between the thermal interface layer and the at least one die, wherein the thermal interface layer enhances conductive heat transfer between the at least one device layer and the at least one die, and a heat sink located adjacent to a heat spreader, wherein the thermal interface layer, the at least one die and the at least one device layer are located between the heat spreader and the substrate.