3D IC Vertical Interconnect Layout for Lower IR Drop

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Solution Overview

Problem

Existing 3D integrated circuits face challenges in efficiently connecting multiple die layers with uniform density and layout of vertical interconnect structures, leading to inefficiencies in power signal transmission and increased IR drop.

Innovation Solution

The implementation of vertically stacked die layers with varying layouts and densities of vertical interconnect structures (VISs) tailored to the specific power requirements of each layer, using through-silicon vias (TSVs) to optimize area usage and reduce resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If uniform density and layout of vertical interconnect structures are used across all die layers, then manufacturing simplicity is maintained, but power signal transmission efficiency deteriorates and IR drop increases

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidpower signal transmission efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent implements varying densities of vertical interconnect structures (VISs) in different die layers, with higher density in power-hungry layers and lower density in less demanding layers. This local optimization approach allows each layer to have the appropriate VIS density for its specific power requirements, improving overall power signal transmission efficiency while avoiding the uniform density constraint that causes high IR drop.

Inventive Principle:
Principle #3Local quality

2Reliability

If varying layouts and densities of VISs are implemented to optimize power requirements, then power signal transmission efficiency improves, but device complexity increases

Engineering Contradiction:
Improvepower signal transmission efficiencyVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent divides the 3D IC into multiple die layers, each with independently optimized VIS layouts and densities based on their specific power requirements. This segmentation allows complex optimization to be applied locally to each layer rather than requiring a single complex solution for the entire structure, making the overall implementation more manageable.

Inventive Principle:
Principle #1Segmentation

3Reliability

If higher density of VISs is used in power-hungry die layers, then IR drop is reduced, but area usage increases

Engineering Contradiction:
ImproveIR drop reductionVSAvoiddie layer area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent applies higher VIS density only in specific die layers that have high power requirements, while using lower density in layers with moderate or low power needs. This localized approach ensures that area is consumed only where necessary for power delivery, optimizing the trade-off between IR drop reduction and area usage rather than uniformly increasing density across all layers.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS20250279398A1Vertical interconnect structures in three-dimensional integrated circuits
Publication Date: 2025.09.04 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250279398A1 patent drawing
  • US20250279398A1 patent drawing
  • US20250279398A1 patent drawing

AI summary

A 3D IC structure includes multiple die layers, such as a top die layer and a bottom die layer. The top die layer and/or the bottom die layer each includes devices such as computing units, Analog-to-Digital converters, analog circuits, RF circuits, logic circuits, sensors, Input/Output devices, and/or memory devices. The devices on the first and the second die layers are laterally surrounded by, or adjacent, vertical interconnect structures (VIS).