3D Interferometric Imaging for Workpiece Verification
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Solution Overview
Problem
Current processing apparatuses, such as laser and cutting tools, can only verify the conditions of workpieces in two dimensions, making it impossible to adjust processing conditions for three-dimensional processing and assess irregularities like grinding marks.
Innovation Solution
A processing apparatus equipped with a three-dimensional imaging mechanism that uses a Mirau-type imaging system, including a focusing unit with an objective lens, interference light generation, and a piezoelectric motor for Z-axis movement, to capture and display three-dimensional images of the workpiece, allowing for precise verification of processed conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If two-dimensional imaging means is used to detect workpiece conditions, then the device complexity is reduced, but the measurement precision and ability to verify three-dimensional processing conditions is insufficient
Solution Approach 1:
The patent transitions from two-dimensional imaging to three-dimensional imaging by introducing a focusing means that can move in the Z-direction (depth direction) and by processing images at multiple focal depths. This dimensional expansion enables verification of depth information, groove cross-sectional shapes, and three-dimensional workpiece conditions that were previously undetectable with conventional 2D imaging systems.
2Adaptability or versatility
If conventional imaging means is used, then the ease of operation is maintained, but the ability to adjust processing conditions for three-dimensional processing is lost
Solution Approach 1:
The patent implements a feedback mechanism where three-dimensional images of the workpiece and processed grooves are obtained, analyzed by control means, and used to adjust subsequent processing conditions. The system automatically controls the imaging process, obtains 3D images at multiple focal depths, and uses this information to optimize processing parameters, creating a closed-loop control system that continuously improves processing quality.
3Manufacturing precision
If two-dimensional images are used for processing verification, then the productivity is maintained, but the manufacturing precision of three-dimensional features cannot be ensured
Solution Approach 1:
The patent performs preliminary three-dimensional imaging and analysis before final processing decisions are made. By obtaining 3D images at multiple focal depths in advance and analyzing the workpiece conditions and groove cross-sectional shapes beforehand, the system can plan and adjust processing conditions optimally, ensuring high manufacturing precision while maintaining efficient workflow.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the verification of processed conditions in three dimensions, allowing for proper adjustment of processing parameters and assessment of irregularities, thereby improving the accuracy and quality of processing operations.
Implementation Method 1
return light reflected on the workpiece held on holding surface of the workpiece holding means
Implementation Method 2
focusing means opposed to the holding surface of the workpiece holding means, light applying means for applying light through the focusing means
Implementation Method 3
interference light generating means for generating interference light according to return light reflected on the workpiece held on holding surface of the workpiece holding means
Data Source
AI summary
A processing apparatus including a chuck table for holding a workpiece, a processing unit for processing the workpiece held on the chuck table, and a feeding mechanism for relatively moving the chuck table and the processing unit in an X direction as a feeding direction. The processing apparatus further includes a three-dimensional imaging mechanism for imaging the workpiece held on the chuck table in three dimensions composed of the X direction, a Y direction perpendicular to the X direction, and a Z direction perpendicular to both the X direction and the Y direction and then outputting an image signal obtained above, a control unit for generating a three-dimensional image according to the image signal output from the three-dimensional imaging mechanism, and an output unit for outputting the three-dimensional image generated by the control unit.