3D LC Resonant Pressure Sensor for Compact Accurate Detection
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Solution Overview
Problem
Existing pressure sensors are either large in dimensions or poor in accuracy, particularly in closed environments such as medical implantations and tire pressure detection in automobiles.
Innovation Solution
A pressure sensor design featuring a first substrate with a detection inductor and a second substrate with a pressure-sensitive membrane, forming a sealed pressure reference cavity and a capacitor, connected in series to create an inductance-capacitance resonant circuit, utilizing a three-dimensional detection inductor and capacitors for improved integration and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If pressure sensors based on inductance-capacitance resonant circuits are used in closed environments, then pressure detection capability is achieved, but the sensor dimensions become relatively large
Solution Approach 1:
The patent transitions from planar coil structures to three-dimensional coil structures that extend in the vertical dimension. The coil windings are arranged in multiple layers with different heights, creating a spatial configuration that increases inductance density without proportionally increasing the sensor's footprint area, thereby reducing overall sensor dimensions while maintaining detection capability
Solution Approach 2:
The patent implements nested coil structures where inner coils are positioned within the spatial envelope of outer coils. Multiple coil windings are arranged concentrically and at different heights, allowing the sensor to achieve higher inductance values within a compact volume by efficiently nesting magnetic field-generating elements
2Measurement precision
If three-dimensional detection inductor and capacitors are used, then integration is enhanced and signal transmission quality is improved, but device complexity increases
Solution Approach 1:
The patent combines the detection inductor and capacitor into a tightly integrated resonant circuit unit where the three-dimensional coil structure and capacitor work together as a unified electromagnetic system. This merging allows the components to share common structural elements and mounting arrangements, reducing overall device complexity despite the advanced three-dimensional configuration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves a small-sized pressure sensor with high accuracy by enhancing integration and signal transmission quality, reducing volume while maintaining precise pressure detection.
Implementation Method 1
the pressure-sensitive membrane is configured to deform towards or away from the first substrate
Implementation Method 2
a capacitor, including a first electrode plate and a second electrode plate arranged opposite to each other
Implementation Method 3
the detection inductor and the capacitor are connected in series to form an inductance-capacitance resonant circuit
Data Source
AI summary
Provided is a pressure sensor, including: a first substrate; a second substrate having a pressure-sensitive membrane, a pressure reference cavity is provided between the pressure-sensitive membrane and the first substrate, the pressure-sensitive membrane is configured to deform; a capacitor having a first/second electrode plate, the first electrode plate being disposed on the first substrate, the second electrode plate being disposed on the pressure-sensitive membrane; a detection inductor having coil structures, each coil structure includes a first trace, a second trace and a conductive post; the first trace is disposed on a side of the first substrate, the second trace is disposed on the other side of the first substrate, orthographic projections of the first trace and the second trace on the first substrate intersect, the first trace is connected to the second trace at an intersection position; the detection inductor and the capacitor form a resonant circuit.