3D LC Resonator for 100 GHz Substrate Coupling

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Solution Overview

Problem

Resonators of split-ring type have low coupling capacitance with semiconductor substrates, leading to inefficient electrical field coupling and difficulties in connecting to current generators or detectors, especially at high frequencies greater than 100 GHz.

Innovation Solution

A three-dimensional electrical resonator device with a separating layer and two conductive tracks, where the tracks have overlapping parts forming capacitances and an inductive loop, generating a magnetic field parallel to the electrical field, allowing for improved coupling and easy connection to generators or detectors, with adjustable inductance and capacitance for specific resonant frequencies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If split-ring resonators are used with metallic tracks forming loops, then the resonator can operate at high frequencies, but the coupling capacitance with the semiconductor substrate remains low

Engineering Contradiction:

Improvecoupling capacitanceVSAvoidresonator structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent transitions from planar 2D resonator structures to 3D configurations by positioning conductive tracks on opposite sides of a separating layer. This vertical stacking creates overlapping regions that form capacitances perpendicular to the substrate plane, dramatically improving coupling capacitance while maintaining high-frequency operation capability

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The invention embeds multiple functional elements within a compact 3D structure: conductive tracks are nested on both sides of a separating layer, with overlapping sections creating capacitive regions. The inductive loop is integrated within this nested configuration, achieving multiple functions (inductance, capacitance, coupling) in a single compact structure

Inventive Principle:

Principle #7Nested doll (Nesting)

2Reliability

If the electrical field in the capacitive zone extends parallel to the substrate surface, then propagation effects are enhanced, but coupling to the semiconductor substrate is reduced

Engineering Contradiction:

Improvesubstrate couplingVSAvoidpropagation efficiency

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

Instead of allowing the electrical field to extend parallel to the substrate surface as in conventional designs, the patent inverts the field orientation by creating capacitive zones where the electrical field extends perpendicular to the substrate. This is achieved by positioning conductive tracks on opposite sides of a separating layer with overlapping regions, forcing the field lines to traverse the separating layer vertically, thereby improving substrate coupling while suppressing unwanted propagation effects

Inventive Principle:

Principle #13The other way round (Inversion)

3Ease of operation

If the resonator device is made compact for high frequency operation, then the resonance wavelength is maintained, but connection to current generators or detectors becomes difficult

Engineering Contradiction:

Improveconnection easeVSAvoiddevice dimensions

Core Design Contradiction:

Ease of operationVSVolume of moving object

Solution Approach 1:

The patent designs the conductive tracks to serve multiple functions simultaneously: they form the inductive loop for resonance, create overlapping capacitive regions for coupling, and extend to provide external connection points. This multi-functionality allows the compact resonator to be easily connected to current generators or detectors without requiring additional components or increasing the overall device volume

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The resonator device operates in a quasistatic state with enhanced electrical field intensity and magnetic field parallelism, enabling efficient energy storage and easy integration with current sources or detectors, while maintaining small dimensions relative to the resonance wavelength.

Implementation Method 1

the inductive loop being suitable for generating a magnetic field inside the inductive loop and around the tracks

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

each overlapping part of the first track being positioned facing a respective overlapping part of the second track so as to form two capacitances

Methodology Applied

Scientific EffectCapacitance: Capacitance

Implementation Method 3

having a given resonant frequency greater than or equal to 100 gigahertz

Methodology Applied

Scientific EffectResonance: Resonance

Data Source

PatentUS10297896B2Three-dimensional LC electrical resonator device

Publication Date: 2019.05.21 UNIV PARIS CITE

AI summary

The invention relates to a three-dimensional LC electrical resonator device having a given resonant frequency of 100 gigahertz or more, comprising: a separating layer; a first track made of a conductor and comprising two overlapping portions; and a second track made of a conductor, the second track comprising two overlapping portions and an inductive loop connecting the two overlapping portions, the first track and the second track respectively being formed on either side of the separating layer, each overlapping portion of the first track being placed facing a respective overlapping portion of the second track so as to form two capacitors that are spatially spaced apart from each other.