3D Magnetic Memory Devices with Metallic Buffer Layer

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Solution Overview

Problem

Conventional MRAM devices face challenges with poor thermal stability and data retention as device size decreases, limiting their implementation in high-density memory arrays due to reliance on interfacial anisotropy and shape anisotropy, which becomes impractical at small sizes.

Innovation Solution

A three-dimensional MRAM device with a cylindrical Magnetic Tunnel Junction (MTJ) geometry, featuring a central core and concentric ferromagnetic layers, utilizes the Spin Hall Effect to reduce switching current and enhance thermal stability, allowing for smaller sizes while maintaining data retention, and employs a metallic buffer layer to manage interfacial anisotropy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If conventional planar MTJ geometry is used, then device structure is simple, but thermal stability deteriorates as device size decreases

Engineering Contradiction:
Improvethermal stabilityVSAvoiddevice size
Core Design Contradiction:
Stability of the object's compositionVSLength of moving object

Solution Approach 1:

The patent transitions from conventional planar two-dimensional MTJ structure to a three-dimensional cylindrical geometry. The magnetic tunnel junction is formed with layers stacked vertically around a central core, creating a cylindrical active region. This dimensional change enables better thermal stability at small sizes by utilizing vertical stacking and interfacial anisotropy more effectively, allowing device sizes to be reduced while maintaining sufficient thermal energy barriers for data retention.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested structure where multiple ferromagnetic layers and non-magnetic spacer layers are stacked concentrically around a central core. The cylindrical MTJ structure contains reference layers, storage layers, and barrier layers nested within each other in a radial configuration. This nesting arrangement maximizes the use of interfacial anisotropy at multiple interfaces, thereby enhancing thermal stability in a compact volume.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Quantity of substance

If device size is reduced for high-density memory, then storage capacity increases, but data retention deteriorates

Engineering Contradiction:
Improvestorage capacityVSAvoiddata retention
Core Design Contradiction:
Quantity of substanceVSDuration of action of stationary object

Solution Approach 1:

By adopting three-dimensional cylindrical geometry with vertical stacking of magnetic layers, the patent achieves higher storage density within a smaller footprint while maintaining adequate data retention. The vertical configuration allows multiple bit layers to be stacked, increasing storage capacity without proportionally reducing the thermal stability that ensures data retention.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent modifies material parameters and layer thicknesses to optimize the balance between device size and data retention. By adjusting the composition and thickness of ferromagnetic layers, non-magnetic spacers, and tunnel barriers, the design achieves sufficient thermal energy barriers in reduced-size devices, enabling high-density storage while maintaining data retention characteristics.

Inventive Principle:
Principle #35Parameter changes

3Stability of the object's composition

If interfacial anisotropy is relied upon for thermal stability, then thermal stability can be achieved, but device complexity increases at small sizes

Engineering Contradiction:
Improvethermal stabilityVSAvoiddevice complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent uses nested concentric layers with multiple interfaces between ferromagnetic and non-magnetic materials. This nested configuration naturally generates interfacial anisotropy at each interface, providing thermal stability without requiring additional complex structures. The systematic stacking of layers with controlled thicknesses and materials creates the necessary anisotropy through the interfaces themselves.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent employs composite material structures combining ferromagnetic layers (such as CoFeB, CoFe) with non-magnetic spacer layers (such as Ru, Ta, MgO) in a cylindrical configuration. These composite layers are engineered to produce strong interfacial anisotropy, providing thermal stability through material composition rather than geometric complexity, thereby simplifying the overall device design at small dimensions.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The three-dimensional MRAM device achieves higher thermal energy barriers, improved thermal stability, and increased tunnel magnetoresistance ratios, enabling compatibility with ultra-dense geometries and faster switching times, thus overcoming the limitations of conventional planar geometries.

Implementation Method 1

employs a metallic buffer layer to manage interfacial anisotropy

Methodology Applied
Scientific EffectInterfacial anisotropy: Anisotropy

Implementation Method 2

utilizes the Spin Hall Effect to reduce switching current and enhance thermal stability

Methodology Applied
Scientific EffectSpin Hall Effect: Hall Effect

Implementation Method 3

Due to the spin-polarized electron tunneling effect, the electrical resistance of the cell changes due to the relative orientation of the magnetization of the two layers

Methodology Applied
Scientific EffectTunnel magnetoresistance: Magnetoresistance

Data Source

PatentUS11456410B2Three-dimensional (3D) magnetic memory devices comprising a magnetic tunnel junction (MTJ) having a metallic buffer layer
Publication Date: 2022.09.27 INTEGRATED SILICON SOLUTION CAYMAN INC
  • US11456410B2 patent drawing
  • US11456410B2 patent drawing
  • US11456410B2 patent drawing

AI summary

A magnetic memory device comprises a cylindrical core and a plurality of layers surrounding the core. The plurality of layers include a metallic buffer layer, a ferromagnetic storage layer, a barrier layer, and a ferromagnetic reference layer. The cylindrical core, the metallic buffer layer, the ferromagnetic storage layer, the barrier layer, and the ferromagnetic reference layer collectively form a magnetic tunnel junction. A magnetization of the ferromagnetic layer storage parallels an interface between the metallic buffer layer and ferromagnetic storage layer.