3D Memory Array Bonding With Dual-Level Peripheral Circuits

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Solution Overview

Problem

Current semiconductor technologies face challenges in forming efficient three-dimensional memory devices with enhanced drive current, particularly in integrating logic and memory dies with effective peripheral circuits for controlling electrical nodes in a compact and high-performance manner.

Innovation Solution

A bonded assembly is formed by integrating a memory die with a three-dimensional memory array and a logic die, where a first peripheral circuit on the logic die controls one set of electrical nodes, and a second peripheral circuit, located at a different vertical level, controls another set, utilizing doped semiconductor material layers, dielectric material layers, and metal interconnect structures for efficient electrical connectivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If a single peripheral circuit is used to control electrical nodes in three-dimensional memory, then device complexity is reduced, but drive current and control efficiency are insufficient

Engineering Contradiction:
Improvedrive currentVSAvoidperipheral circuit configuration
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

The patent transitions from a planar single-level peripheral circuit configuration to a three-dimensional dual-level configuration. The first peripheral circuit is positioned at a first vertical level and the second peripheral circuit at a second vertical level, enabling independent control of different electrical node sets (first bit lines and second bit lines) with enhanced drive current capability while maintaining compact integration.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If logic die and memory die are integrated in a bonded assembly, then manufacturing efficiency is improved, but integration complexity increases

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidbonded assembly integration
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent merges the logic die and memory die into a single bonded assembly, where the logic die containing peripheral circuits is bonded to the memory die containing the three-dimensional memory array. This integration enables coordinated control of memory operations with enhanced drive current capability while improving manufacturing efficiency through unified device fabrication.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS20240032299A1Three-dimensional memory array with dual-level peripheral circuits and methods for forming the same
Publication Date: 2024.01.25 SANDISK TECHNOLOGIES LLC
  • US20240032299A1 patent drawing
  • US20240032299A1 patent drawing
  • US20240032299A1 patent drawing

AI summary

A bonded assembly includes a memory die containing a three-dimensional memory array, a first logic die bonded to the memory die, a first peripheral circuit located in the logic die and configured to control operation of a first set of electrical nodes of the three-dimensional memory array, and a second peripheral circuit configured to control operation of a second set of electrical nodes of the three-dimensional memory array, where the second peripheral circuit is located at a different vertical level than the first peripheral circuit relative to the three-dimensional-memory array.