3D Vertical Memory Cell String With Ion-Exchange Resistance Switching

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Solution Overview

Problem

Existing three-dimensional vertical non-volatile memory devices face challenges in enhancing integration density and efficiency, particularly in ion movement and resistance switching mechanisms.

Innovation Solution

A three-dimensional vertical non-volatile memory device is designed with a memory cell string comprising a channel layer, ion reservoir layer, electrolyte layer, and gate electrodes, where the ion reservoir layer and channel layer move ions based on applied voltages, utilizing metal oxide materials with varying oxygen vacancy concentrations to achieve resistance changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If vertical stacking of memory cells is increased to enhance integration density, then storage capacity is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvestorage capacityVSAvoiddevice complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The memory device is segmented into multiple functional layers including channel layer, ion reservoir layer, electrolyte layer, and gate electrode layers stacked vertically. Each layer performs a specific function, allowing complex functionality to be achieved through modular vertical stacking rather than horizontal integration, thus managing device complexity while increasing storage capacity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar two-dimensional memory cell arrangement to three-dimensional vertical stacking. Memory cells are arranged along the vertical direction with multiple layers stacked on top of each other, effectively utilizing the third dimension to increase integration density and storage capacity without proportionally increasing device footprint or manufacturing complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If ion movement control is enhanced for better resistance switching, then operational efficiency is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveoperational efficiencyVSAvoidmanufacturing precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent employs different materials with specific local properties in different layers to optimize ion movement control. The ion reservoir layer uses metal oxide materials with high oxygen vacancy concentration to facilitate ion storage and movement, while the electrolyte layer uses materials with appropriate ionic conductivity. This local optimization of material properties enhances operational efficiency without requiring extreme manufacturing precision across the entire device.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent controls resistance switching by changing physical parameters such as oxygen vacancy concentration in metal oxide materials and applying voltage to drive ion movement. By adjusting these parameters (oxygen content, voltage magnitude, layer thickness), the device achieves efficient resistance switching between LRS and HRS states while maintaining manufacturability through standard semiconductor processing techniques.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device enables efficient ion movement and resistance switching, allowing for high integration density and improved operational efficiency through controlled ion exchange between the ion reservoir and channel layers.

Implementation Method 1

The ion reservoir layer and the channel layer may be configured to move ions to each other such that ions may be moved from the ion reservoir layer to the channel layer or from the channel layer to the ion reservoir layer according to a voltage applied to the plurality of gate electrodes

Methodology Applied
Scientific EffectIon movement: Ion Exchange

Implementation Method 2

utilizing metal oxide materials with varying oxygen vacancy concentrations to achieve resistance changes

Methodology Applied
Scientific EffectOxygen vacancy concentration effect: Electrical Resistance

Data Source

PatentUS20250374539A1Three-dimensional vertical nonvolatile memory device including memory cell string
Publication Date: 2025.12.04 SAMSUNG ELECTRONICS CO LTD
  • US20250374539A1 patent drawing
  • US20250374539A1 patent drawing
  • US20250374539A1 patent drawing

AI summary

A three-dimensional vertical non-volatile memory device may include a plurality of memory cell strings, which each may include a channel layer extending in a first direction, a plurality of gate electrodes and a plurality of spacers alternately arranged in the first direction and each extending in a second direction intersecting the first direction, an ion reservoir layer extending in the first direction between the channel layer and the plurality of gate electrodes and between the channel layer and the plurality of spacers, and an electrolyte layer extending in the first direction between the channel layer and the ion reservoir layer. The ion reservoir layer and the channel layer may be configured to move ions such that ions may be moved from the ion reservoir layer to the channel layer or from the channel layer to the ion reservoir layer according to a voltage applied to the plurality of gate electrodes.