3D MEMS Sensor with Center Mass for Multi-Axis Detection
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Solution Overview
Problem
Current MEMS sensors are limited to detecting capacitance variations in two dimensions, lacking a solution for three-dimensional detection.
Innovation Solution
A 3-dimensional MEMS sensor design featuring a movable electrode frame with three axes (x, y, z) and a connection part including a center mass, periphery mass, and springs, allowing for non-parallel axes to form a 3D coordinate system and detect displacements through capacitance variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If traditional in-plane or out-of-plane sensor designs are used, then the sensor can detect capacitance variation in one or two directions, but it cannot detect capacitance variations in three dimensions
Solution Approach 1:
The patent transitions from traditional 2D sensor designs (in-plane or out-of-plane) to a 3D configuration by arranging three sets of electrodes along three non-parallel axes that define a 3D coordinate system. This dimensional expansion enables capacitance variation detection in three dimensions simultaneously, directly resolving the limitation of conventional sensors.
Solution Approach 2:
The patent combines three separate sensing functions (along three different axes) into a single integrated sensor device. By merging multiple electrode sets and their corresponding capacitors into one unified structure with a common movable electrode frame, the sensor achieves 3D detection capability without requiring three separate sensors, thus balancing enhanced functionality with controlled complexity.
2Adaptability or versatility
If three separate sensors are used to detect displacements in three dimensions, then complete 3D detection is achieved, but device complexity and space occupation increase
Solution Approach 1:
The patent integrates three sensing functions into a single compact sensor device. By sharing common components (movable electrode frame, connection part with center mass, springs, anchors) among the three axis sensing pairs, the total volume is significantly reduced compared to using three separate sensors, while still achieving complete 3D displacement detection capability.
Solution Approach 2:
The movable electrode frame serves multiple functions simultaneously: it acts as the movable electrode for all three capacitors, provides structural support for the spring-mass system, and enables detection along three different axes. This multi-functionality reduces the overall sensor volume by eliminating redundant components.
3Adaptability or versatility
If three separate sensors are used for 3D detection, then detection capability is sufficient, but manufacturing complexity increases
Solution Approach 1:
The patent combines three sensing functions into a single manufacturable device with shared components. The common movable electrode frame, connection part, springs, and anchors can be manufactured as an integrated assembly, reducing the number of separate manufacturing processes, assembly steps, and quality control checkpoints compared to producing three separate sensors.
Solution Approach 2:
While integrating three sensing functions, the patent maintains clear segmentation of functional modules (electrode frames, connection parts with center mass, spring assemblies, anchor points). This modular segmentation within the unified structure facilitates standardized manufacturing processes and simplifies assembly, offsetting the increased complexity from achieving 3D detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the detection of three-dimensional displacements by forming capacitors along each axis, effectively addressing the limitation of two-dimensional sensing.
Implementation Method 1
the first axis movable electrode and the first axis fixed electrode form a first capacitor along the first axis, the second axis movable electrode and the second axis fixed electrode form a second capacitor along the second axis, and the third axis movable electrode and the third axis fixed electrode form a third capacitor along the third axis
Data Source
AI summary
A 3-dimensional MEMS sensor, comprising: a first axis fixed electrode; a second axis fixed electrode; a third axis fixed electrode; a movable electrode frame including a first axis movable electrode, a second axis movable electrode, a third axis movable electrode, and a connection part connecting the movable electrodes, wherein the first axis movable electrode and the first axis fixed electrode form a first capacitor along the first axis, the second axis movable electrode and the second axis fixed electrode form a second capacitor along the second axis, and the third axis movable electrode and the third axis fixed electrode form a third capacitor along the third axis, the connection part including a center mass, wherein the center mass is at least connected with one of the first, second and third axis movable electrodes, and has an outer periphery and a first interconnecting segment connecting at least two adjacent sides of the outer periphery; at least one spring connecting with the movable electrode frame; and at least one anchor connecting with the spring, wherein the first, second and third axes are not parallel to one another such that they define a 3-dimensional coordinate system.