3D Meniscus Measurement for Stable Inkjet Nozzle Ejection
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Solution Overview
Problem
Existing inkjet systems struggle to accurately measure and quantify the meniscus shape, motion, and position of ink droplets, leading to unstable ejection and defects in display device fabrication.
Innovation Solution
A droplet analysis unit capable of measuring and digitizing the meniscus shape, motion, and position using a 3D surface profiler, incorporating modules for light output, collection, division, detection, and analysis, along with a cleaning system to maintain instrument cleanliness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a drop watcher system is used to measure meniscus motion, then the system can capture images of ink droplets, but it cannot accurately measure the shape, motion, and position of the meniscus
Solution Approach 1:
The patent replaces the mechanical/drop-watcher-based measurement system with an optical measurement system. Specifically, it uses a laser light source to illuminate the meniscus and a line sensor to detect the light reflection pattern, thereby obtaining precise measurements of meniscus shape, position, and motion without mechanical contact or inference from 2D images.
Solution Approach 2:
The patent introduces light as an intermediary to measure meniscus characteristics. By shining laser light on the meniscus and detecting the reflected light pattern with a line sensor, the system converts physical meniscus properties into optical signals that can be precisely measured and quantified.
2Reliability
If traditional inkjet ejection is used, then the process is simple, but the ink exhibits unstable motion in the nozzles causing defects
Solution Approach 1:
The patent implements a feedback mechanism where the optical measurement system continuously monitors meniscus motion and position in real-time. This measurement data is fed back to control the inkjet ejection process, allowing dynamic adjustment of ejection parameters to maintain stable ink flow and prevent defects.
Solution Approach 2:
The patent performs preliminary measurement of meniscus characteristics before ink ejection. By measuring the meniscus state in advance using the optical system, the system can predict and prevent potential ejection issues, ensuring stable ink delivery from the start of the process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement and quantification of meniscus characteristics, improving ink ejection stability and enhancing the quality of display device production by correcting nozzle issues.
Implementation Method 1
a light output module, which outputs light
Implementation Method 2
a light collection module, which collects the light
Implementation Method 3
a light detection module, which detects the light
Data Source
AI summary
A droplet analysis unit capable of measuring and digitizing the meniscus shape, motion, and position of ink droplets and a substrate treatment apparatus including the droplet analysis unit are provided. The substrate treatment apparatus includes: a process treatment unit supporting a substrate while the substrate is being treated; an inkjet head unit treating the substrate by ejecting a substrate treatment liquid onto the substrate using a plurality of nozzles; a gantry unit moving the inkjet head unit over the substrate; and a droplet analysis unit measuring a meniscus in each of the nozzles that is associated with the substrate treatment liquid, wherein the droplet analysis unit measures and quantifies three-dimensional (3D) information regarding the meniscus.