3D Li-Ion Microbattery Electrodes via Nanoimprint Printing
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Solution Overview
Problem
Conventional thin film battery fabrication methods are cost-intensive, energy-intensive, and not scalable for producing high surface area electrodes with both high capacity and power density, particularly for on-chip battery systems.
Innovation Solution
A method involving direct imprinting (nanoimprint lithography) to fabricate 3D woodpile electrodes using nanoparticle-based inks, which involves spin-coating, stamping, annealing, and planarizing to create high aspect ratio parallel grating structures, followed by infilling with nanoparticles to enhance surface area and capacity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional thin film battery fabrication methods are used, then manufacturing process is established, but cost and energy consumption increase significantly
Solution Approach 1:
The patent replaces conventional mechanical and chemical fabrication methods (sputtering, CVD, lithography, etching) with a direct printing approach using inkjet or similar deposition technologies. This substitution eliminates the need for clean room facilities, multiple deposition steps, and high-energy processing, thereby reducing energy consumption while maintaining manufacturing capability.
Solution Approach 2:
The invention changes the fabrication parameters from conventional thin film processes to direct printing parameters. Instead of using batch processes operating at elevated temperatures and reduced pressures, the method employs continuous printing processes at ambient or near-ambient conditions, significantly reducing energy input requirements.
2Quantity of substance
If conventional fabrication methods are used, then planar electrodes are produced, but surface area and capacity are limited
Solution Approach 1:
The patent transitions from two-dimensional planar electrodes to three-dimensional structured electrodes with vertical features such as pillars, gratings, or porous structures. This dimensional change increases the electrode surface area within the same footprint, allowing greater electrolyte contact and higher capacity without increasing the device footprint area.
Solution Approach 2:
The invention employs porous or highly textured electrode structures that provide increased surface area through controlled void spaces. These porous structures allow electrolyte penetration throughout the electrode volume, enhancing the effective capacity while maintaining a compact form factor.
3Manufacturing precision
If multi-step fabrication processes are used, then patterned electrodes are achieved, but manufacturing complexity and cost increase
Solution Approach 1:
The patent extracts and eliminates unnecessary intermediate steps from the conventional fabrication sequence. Instead of depositing planar films, applying photoresist, patterning, etching, and stripping, the direct printing method deposits patterned electrode material directly in the desired configuration, removing multiple process steps while maintaining patterning precision.
Solution Approach 2:
The invention performs the patterning action during the deposition step itself rather than requiring subsequent processing steps. The printing process directly creates the final electrode pattern, eliminating the need for separate photoresist application, lithography, and etching steps that would otherwise be required to achieve the same patterned structure.
4Productivity
If batch processes are used, then fabrication is achievable, but scalability and productivity are limited
Solution Approach 1:
The patent transitions from batch processing to continuous printing operations. The direct printing method allows for uninterrupted deposition of electrode material across large substrates or in sequential layers, significantly increasing throughput and enabling scalable production while maintaining manufacturing control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly enhances both capacity and power density of lithium-ion batteries, achieving 1.5- to 6-fold improvement in specific capacity during fast cycling and enabling high volumetric energy and power density, suitable for next-generation autonomously powered devices.
Implementation Method 1
spin-coating an ink having about 3 wt % TiO2 nanoparticles
Implementation Method 2
annealing the patterned film to form an electrode
Implementation Method 3
curing the photoresist to form a planarized layer
Data Source
AI summary
Various embodiments disclosed relate to novel methods of fabricating 3-D Li ion batteries using direct nanoimprint lithography. The present invention includes methods of fabricating high surface area electrodes, including imprint patterning of high aspect ratio parallel grating style electrodes. The method includes coating a substrate with an ink containing nanoparticles and subsequently annealing the ink into a desired pattern.


