3D Microfluidic Channel Fabrication Using Multi-Focus Ultrafast Lasers
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Solution Overview
Problem
Current methods for processing micro-fluidic chips are limited to two-dimensional channels and require high laser energy or repeated scanning, making it inefficient for fabricating complex three-dimensional micro-channels.
Innovation Solution
The use of multi-focus ultrafast laser technology, specifically converting femtosecond laser into an array-type multi-focus femtosecond laser for fractional ablation, followed by secondary ablation with picosecond or femtosecond ultra-short pulse laser, and ultrasonic-assisted hydrofluoric acid etching to efficiently process micro-channels on micro-fluidic chips.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a tightly-focused single femtosecond laser beam is used for ablation, then processing precision is improved, but processing efficiency deteriorates due to low ablation rate requiring repeated scanning
Solution Approach 1:
The invention divides a single high-energy laser beam into multiple lower-energy beams using beam splitting optics. These multiple beams are then focused simultaneously at different positions within the material to create multiple focal points, enabling parallel ablation of multiple channels or features in a single scan pass, thereby dramatically improving processing efficiency while maintaining precision through controlled focal positioning
Solution Approach 2:
The invention transitions from single-point sequential ablation to multi-point parallel ablation by introducing spatial distribution of multiple focal points along the laser propagation direction and transverse plane. This dimensional expansion allows simultaneous processing of multiple locations, converting a one-dimensional sequential process into a three-dimensional parallel process that enhances throughput
2Volume of moving object
If high laser energy is used to achieve desired structural size in ablation, then ablation depth and width are improved, but thermal effect on surrounding material increases
Solution Approach 1:
The total laser energy required for ablation is segmented into multiple lower-energy beams distributed across multiple focal points. Each individual beam carries reduced energy that minimizes thermal diffusion to surrounding material, while the cumulative effect of multiple beams achieves the desired total ablation volume through spatial distribution rather than concentration of energy
Solution Approach 2:
The invention applies different energy levels to different spatial locations by distributing laser energy across multiple focal points. Each local region receives appropriate energy for precise ablation without excessive thermal accumulation, while the overall structure achieves the required dimensions through the collective contribution of multiple localized ablation zones
3Manufacturing precision
If repeated scanning is performed to fabricate micro-fluidic channels, then desired structural size is achieved, but processing time increases
Solution Approach 1:
The processing task is segmented into multiple simultaneous ablation operations performed by multiple laser beams acting in parallel. Instead of sequentially scanning the same path multiple times to build up channel dimensions, multiple beams create multiple channels or features simultaneously in a single pass, reducing the number of scanning cycles required while maintaining dimensional accuracy through precise focal control
Solution Approach 2:
The invention maintains continuous useful action by having multiple laser beams operate simultaneously throughout the processing field, eliminating idle time between sequential scans. All beams perform productive ablation work concurrently during each scan pass, maximizing the utilization of laser energy and minimizing non-productive scanning cycles
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enhances processing precision, efficiency, and safety, allowing for large-scale, flexible, and high-precision fabrication of complex three-dimensional micro-channels on micro-fluidic chips with reduced energy consumption.
Implementation Method 1
converting femtosecond laser into an array-type multi-focus femtosecond laser using a laser multi-focus technology to perform fractional ablation on a section of micro-channels to be processed of the micro-fluidic chip
Implementation Method 2
the array-type multi-focus femtosecond laser is output by using laser multi-focus technology to efficiently process micro-fluidic chips
Implementation Method 3
performing a secondary ablation on the micro-channels to be processed of the micro-fluidic chip using a picosecond or a femtosecond ultra-short pulse laser
Implementation Method 4
subjecting the micro-fluidic chip to ultrasonic-assisted hydrofluoric acid etching to dredge the micro-channels after undergoing the fractional ablation and the secondary ablation
Data Source
AI summary
A method for processing a micro-channel of a micro-fluidic chip using multi-focus ultrafast laser, in which an array-type multi-focus femtosecond laser is used to perform fractional ablation on the micro-fluidic chip, and then pulse laser is used to perform secondary ablation on the micro-fluidic chip. Ultrasonic-assisted hydrofluoric acid etching is performed on the micro-fluidic chip after ablation to obtain a true three-dimensional micro-channel on the micro-fluidic chip. A device for processing a micro-channel of a micro-fluidic chip using multi-focus ultrafast laser is also provided.