3D Non-Volatile Memory Cell With Series Selector Elements

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Solution Overview

Problem

Current non-volatile memory devices face challenges in reducing leakage currents and managing snapback currents, which affect the efficiency and reliability of memory operations, especially as process geometries shrink.

Innovation Solution

Incorporating a series connection of two selector elements with different leakage characteristics and switching times within each non-volatile memory cell, along with a capacitor to absorb snapback current, to optimize the current-voltage characteristics and reduce leakage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single selector element is used in the memory cell, then the device complexity is low, but the leakage current is high and snapback effects are significant

Engineering Contradiction:
Improveleakage current controlVSAvoidselector element configuration
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The single selector element is segmented into two series-connected selector elements with different leakage characteristics. This segmentation allows each element to contribute differently to the overall cell behavior, with one element providing low leakage and the other providing appropriate switching characteristics, thereby reducing total leakage current while managing snapback effects.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the selector element chain are assigned different leakage characteristics. The first selector element has a first leakage current and the second selector element has a second leakage current, where their combination optimizes the overall cell performance. This local differentiation of properties allows simultaneous optimization of leakage control and switching behavior.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If process geometries are shrunk to reduce cost per bit, then the manufacturing precision is improved, but the leakage current increases and snapback effects worsen

Engineering Contradiction:
Improveprocess geometry controlVSAvoidleakage current control
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The invention changes the electrical parameters of the selector elements by using series connection and selecting elements with different leakage characteristics. This parameter transformation allows the memory cell to maintain low leakage current even when physical dimensions are reduced, compensating for the increased leakage that typically accompanies scaled geometries.

Inventive Principle:
Principle #35Parameter changes

3Speed

If faster switching elements are used, then the switching speed is improved, but the snapback current increases

Engineering Contradiction:
Improveswitching speedVSAvoidsnapback current
Core Design Contradiction:
SpeedVSObject-generated harmful factors

Solution Approach 1:

The snapback current, which is typically a harmful effect, is converted into a beneficial feature by using a selector element with higher leakage current that provides snapback. This controlled snapback helps reduce the overall leakage current of the memory cell while maintaining fast switching speeds, transforming a traditionally negative effect into a positive contribution to cell performance.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration achieves low leakage currents and high read margins while minimizing snapback effects, enhancing the performance and reliability of non-volatile memory devices.

Implementation Method 1

a capacitor to absorb snapback current

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

selector elements with different leakage characteristics and switching times

Methodology Applied
Scientific EffectResistive switching: Electrical Resistance

Data Source

PatentUS10355049B1Methods and apparatus for three-dimensional non-volatile memory
Publication Date: 2019.07.16 SANDISK TECHNOLOGIES LLC
  • US10355049B1 patent drawing
  • US10355049B1 patent drawing
  • US10355049B1 patent drawing

AI summary

An apparatus is provided that includes a bit line above a substrate, a word line above the substrate, and a non-volatile memory cell between the bit line and the word line. The non-volatile memory cell includes a reversible resistance-switching memory element coupled in series with an isolation element. The isolation element includes a first selector element coupled in series with a second selector element.