3D Porous Structures via Gas Phase Coating

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Solution Overview

Problem

There is a need to produce porous three-dimensional structures in a simple and precise manner, as existing methods are either complex or lack the ability to create structures with desired porosity and connectivity.

Innovation Solution

The method involves applying particles onto a carrier element with formed cavities, which are then connected by a solid, non-volatile coating, preferably using CVD or ALD, allowing for varying porosity and connectivity depending on coating thickness and material properties, enabling the creation of three-dimensional structures with high precision and reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If particles are applied onto a carrier element to form a three-dimensional structure, then the structure can be produced with simple process steps, but the connection strength between particles is insufficient without additional bonding mechanisms

Engineering Contradiction:

Improveprocess simplicityVSAvoidparticle connection strength

Core Design Contradiction:

Ease of manufactureVSStrength

Solution Approach 1:

A coating layer is introduced as an intermediary substance between particles to enable reliable connection. The coating is deposited from the gas phase onto particle contact points, forming a bonding medium that strengthens particle connections without complicating the overall process flow

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The mechanical application process is replaced by gas phase deposition. Instead of mechanically bonding particles, a coating is deposited from the gas phase onto particle surfaces at contact points, substituting mechanical bonding with a chemical/physical deposition process that achieves stronger connections

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If a coating layer is deposited to connect particles, then connection reliability is improved, but the complexity of the manufacturing process increases

Engineering Contradiction:

Improveconnection reliabilityVSAvoidprocess complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The coating deposition is performed in a continuous gas phase process without interrupting the particle arrangement. The coating material is continuously deposited onto particle contact points, maintaining process continuity and avoiding additional discrete bonding steps that would increase complexity

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The state of the coating material is changed from liquid to gas phase for deposition. By utilizing gas phase deposition, the coating can be applied uniformly and controllably without the complexity of liquid handling, drying, and curing steps associated with liquid coatings

Inventive Principle:

Principle #35Parameter changes

3Manufacturing precision

If the coating penetrates cavities between particles, then porosity control is improved, but the risk of cavity closure increases

Engineering Contradiction:

Improveporosity controlVSAvoidcavity connectivity

Core Design Contradiction:

Manufacturing precisionVSStability of the object's composition

Solution Approach 1:

The coating deposition is controlled to partially penetrate the cavities rather than completely filling them. By adjusting deposition parameters, the coating reaches into cavities to connect particles while leaving sufficient space to maintain cavity openness and porosity, achieving partial penetration that balances connection and porosity requirements

Inventive Principle:

Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for the production of three-dimensional structures with controlled porosity and connectivity, enabling strong and reliable connections while maintaining the structural integrity and porosity, suitable for various applications including microelectronic components.

Implementation Method 1

Any materials that can be deposited by means of CVD and preferably by means of ALD or AVD can preferably be used as the coating material

Methodology Applied

Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 2

In the case of atomic layer deposition, two different components in the gaseous state are introduced alternately, with these accumulating on the surface of the particles or the carrier element

Methodology Applied

Scientific EffectAtomic layer deposition: Chemical Vapour Deposition

Data Source

PatentEP2670880B1Method for producing a three-dimensional structure and three-dimensional structure

Publication Date: 2018.07.18 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV

Figure 1a~2c
Figure 3a~3e
Figure 4a~5d

AI summary

The invention relates to a method for producing a three-dimensional structure. The method according to the invention comprises the following steps: applying to or introducing into a carrier element (1; 7; 16) particles (2), a plurality of at least partially interlinked cavities being formed between the particles (2) and the particles (2) coming into contact in points of contact, and interconnecting the particles (2) in the points of contact by coating the system consisting of particles and the carrier element, the coat (4) produced during coating penetrating the cavities at least to some extent. The method according to the invention allows the production of three-dimensional structures with little effort.