3D-Printed Single-Piece Gas Mixer to Reduce Particle Generation
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Solution Overview
Problem
Current gas mixers for atomic layer deposition processes suffer from particle generation, tilting issues, high cost, and long lead times due to their two-part design, which complicates installation and increases the risk of damage.
Innovation Solution
A single-piece gas mixer integrated by additive manufacturing with fins in a hollow passage to change gas direction, reducing particle generation and damage risk while minimizing volume and manufacturing time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a two-part gas mixer design is used, then installation flexibility is improved, but particle generation and tilting issues occur reducing reliability
Solution Approach 1:
The patent combines the mixer body and spacer into a single integrated component manufactured via additive manufacturing. This eliminates the interface between two separate parts, preventing particle generation at joints and eliminating tilting issues while maintaining installation flexibility through the monolithic design.
2Manufacturing precision
If traditional manufacturing methods are used for gas mixers, then manufacturing precision is achieved, but production cost and lead time increase
Solution Approach 1:
The patent transitions from traditional subtractive manufacturing to additive manufacturing, fundamentally changing the manufacturing parameter space. This enables complex internal geometries and integrated structures to be produced more efficiently, reducing both cost and lead time while maintaining or improving precision through digital modeling and controlled deposition processes.
3Productivity
If gas mixer volume is increased to improve mixing, then mixing efficiency is improved, but space constraints in processing chambers are violated
Solution Approach 1:
The patent utilizes three-dimensional printing capabilities to create complex internal geometries and fin structures within a compact external footprint. The additive manufacturing process allows mixing elements to be arranged in multiple dimensions and orientations, achieving high mixing efficiency without increasing the overall volume occupied in the processing chamber.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The single-piece design enhances mixing efficiency, reduces installation risks, and lowers production costs by integrating the mixer and spacer, ensuring effective gas mixing without additional volume, thus improving process speed and reliability.
Implementation Method 1
The plurality of fins extend into the hollow passage
Data Source
AI summary
Embodiments of the present disclosure generally relate to mixing gases for deposition processes. Specifically, the disclosure relates to a 3D printed single piece gas mixer that mixes a plurality of gases prior to the gases entering a processing chamber. In one embodiment a mixer is provided. The mixer includes a body, an inlet, an outlet, and a hollow passage. The hollow passage is disposed through the body and fluidly connects the inlet to the outlet. The hollow passage includes a sidewall. The mixer further includes a plurality of fins formed on the sidewall. The plurality of fins extend into the hollow passage, and the plurality of fins and the sidewall form a monolithic structure.