3D Printed Plasma Arrestor for Electrostatic Chuck
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Solution Overview
Problem
The existing manufacturing process for plasma arrestors in substrate processing systems is expensive and time-consuming due to the difficulty of working with ceramic materials.
Innovation Solution
A 3-D printing method using electrically non-conductive materials such as ceramic, glass, or plastic to create an arrestor with a gas flow channel that deviates from a direct line of sight between the gas inlet and outlet, preventing plasma from directly passing through, thereby reducing the complexity and cost of production.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional ceramic materials are used to manufacture the arrestor, then the plasma blocking function is achieved, but the manufacturing cost and time increase significantly
Solution Approach 1:
The patent changes the material parameter from traditional sintered ceramic to 3D-printable materials (ceramic paste, plastic, or glass) that can be processed by additive manufacturing. This parameter change enables the arrestor to maintain plasma blocking functionality while dramatically reducing manufacturing complexity and cost, as 3D printing allows direct fabrication without expensive sintering processes.
Solution Approach 2:
The patent replaces the traditional mechanical sintering process with a 3D printing process. Instead of using complex mechanical sintering equipment and high-temperature furnaces, the invention uses additive manufacturing technology to directly create the arrestor structure, substituting a simpler, more cost-effective manufacturing system while maintaining the required functional performance.
2Productivity
If the gas flow channel is arranged in a direct line between inlet and outlet, then the gas flow efficiency is maximized, but plasma can pass directly through the arrestor
Solution Approach 1:
The patent solves the contradiction by transitioning from a one-dimensional direct linear path to a three-dimensional complex curved path within the arrestor body. The gas flow channel is designed with multiple bends and directional changes that prevent straight-line plasma propagation while still allowing efficient gas flow through the porous structure. This dimensional approach allows the channel to block line-of-sight plasma paths while maintaining gas permeability through the porous material.
Solution Approach 2:
The patent employs curved and bent channel geometries instead of straight lines. The gas flow channel includes multiple bends and curved sections that deflect the flow path, ensuring that plasma cannot travel in a straight line from inlet to outlet. The curved geometry maintains fluid flow efficiency while effectively blocking direct plasma transmission through the arrestor.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The 3-D printed arrestor effectively prevents plasma from passing directly between the inlet and outlet, enhancing the efficiency and reducing production costs while maintaining the necessary gas flow functionality.
Implementation Method 1
radio frequency (RF) plasma may be used to activate chemical reactions
Implementation Method 2
printing first layers of an arrestor for an electrostatic chuck using a 3-D printer and an electrically non-conductive material
Data Source
AI summary
A method for manufacturing an arrestor for an electrostatic chuck includes printing first layers of an arrestor for an electrostatic chuck using a 3-D printer and an electrically non-conductive material. The first layers of the arrestor at least partially define a first opening to a gas flow channel. The method includes printing intermediate layers of the arrestor using the 3-D printer and the electrically non-conductive material. The intermediate layers of the arrestor at least partially define the gas flow channel. The method includes printing second layers of the arrestor using the 3-D printer and the electrically non-conductive material. The second layers of the arrestor at least partially define a second opening of the gas flow channel. At least one of the first opening, the second opening and/or the gas flow channel of the arrestor is arranged to prevent a direct line of sight between the first opening and the second opening of the arrestor.