3D-Printed RF Susceptors for Rapid Heating and Cooling
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Solution Overview
Problem
Conventional manufacturing techniques are limited in producing RF susceptors with thin geometries and complex shapes, leading to inefficiencies in heating and cooling rates, which are critical for rapid annealing processes.
Innovation Solution
Utilizing 3D printing to fabricate RF susceptors with thin wall thicknesses (less than 1 mm) and complex geometries, such as hollow structures and meshes, from materials like tungsten, graphite, or alloys, enabling rapid heating and cooling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional machining methods are used to manufacture RF susceptors, then manufacturing precision and structural integrity are maintained, but the susceptor thickness cannot be reduced below certain limits and complex geometries cannot be achieved
Solution Approach 1:
The patent replaces conventional mechanical machining methods with additive manufacturing (3D printing) technology. This substitution enables the fabrication of thin-walled RF susceptors with complex geometries that cannot be achieved through traditional machining, as additive manufacturing builds structures layer-by-layer without mechanical tool constraints.
Solution Approach 2:
The patent changes the manufacturing approach from subtractive (machining) to additive (3D printing), fundamentally altering the process parameters and capabilities. This parameter change allows for wall thicknesses and geometric complexities that were previously unmanufacturable while maintaining structural integrity.
2Speed
If susceptor thermal mass is reduced to enable faster cooling, then cooling rate improves, but RF power absorption efficiency decreases due to insufficient material thickness
Solution Approach 1:
The patent moves from conventional thin-walled cylindrical susceptors to three-dimensional geometric structures with optimized surface-area-to-volume ratios. By utilizing complex 3D geometries enabled by additive manufacturing, the susceptor achieves rapid cooling through increased surface area while maintaining sufficient volumetric material for effective RF power absorption.
Solution Approach 2:
The patent applies different material distributions and geometric features to different regions of the susceptor. Additive manufacturing allows local optimization where material is placed only where needed for RF absorption, while other regions are designed with thinner walls or enhanced surface area for rapid heat dissipation, achieving both goals simultaneously.
3Power
If RF power is increased to achieve higher heating rates, then heating speed improves, but cooling rate must also increase to maintain transient heating cycles
Solution Approach 1:
The patent designs the susceptor with dynamic thermal characteristics through optimized geometry. The additive-manufactured structure allows rapid adjustment of thermal mass and surface area to match the dynamic requirements of transient heating cycles, enabling the susceptor to rapidly absorb power during heating phases and quickly dissipate heat during cooling phases.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The 3D-printed susceptors achieve significantly faster heating and cooling cycles, improving annealing processes by reducing thermal mass and enhancing heat transfer, allowing for higher temperature applications like GaN dopant activation.
Implementation Method 1
the susceptor is directly heated by nearby RF coils
Implementation Method 2
causing the susceptor to glow which transfers heat
Implementation Method 3
transfers heat via the infrared and visible light to the material of interest
Implementation Method 4
heat loss from the susceptor to the environment by radiation, convection, and conduction
Implementation Method 5
heat loss from the susceptor to the environment by radiation, convection, and conduction
Data Source
AI summary
RF susceptors manufactured by means of 3D printing. 3D-printed susceptors in accordance with the invention include susceptors having solid or mesh walls, where the susceptors are in the form of hollow cylinders, pyramids, spheres, hemispheres, ellipsoids, paraboloids, toroids, or prisms; flat planes; or other hollow or solid three-dimensional shapes. The 3D-printed susceptors can be formed from any suitable starting material, such as tungsten powder, graphite, silicon carbide, molybdenum powder, tantalum powder, rhenium powder, or alloys thereof, or can be formed such that some portions of the susceptors are formed from one or more materials while other portions are formed from different material(s).