3D Shape Measurement Using Phase and Focal Position Detection
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Solution Overview
Problem
Existing methods for determining the three-dimensional shape of an object, such as a device on a substrate, face challenges including the need for large inspection spaces due to mirror surfaces and the generation of noise in diffraction pattern imaging.
Innovation Solution
An apparatus and method utilizing multiple light sources and optical components to irradiate pattern lights and monochromatic lights onto the object, capturing reflected lights, and using a processor to determine the three-dimensional shape by analyzing phase changes and light amount variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a method of irradiating light on the device and inspecting the tilt by using a position where the reflected light forms an image is utilized, then the tilt of the upper surface can be inspected, but a large space is required to measure the imaging position of the reflected light
Solution Approach 1:
The patent transitions from measuring tilt in two-dimensional space (image position on a plane) to measuring in three-dimensional space by capturing the focal position of reflected light along the optical axis. The processor calculates tilt based on the depth distance from the light source to the focal point, enabling precise tilt measurement without requiring large lateral inspection space.
Solution Approach 2:
The patent replaces the traditional optical imaging method (which requires large space to capture reflected light images) with a focal position detection method using light sources and sensors. This substitution of the measurement mechanism enables tilt inspection in a compact configuration by measuring the focal depth rather than lateral image displacement.
2Measurement precision
If a method of irradiating structured light to the device, forming a diffraction pattern in the air above the device, and inspecting the tilt through the use of a phase change of the diffraction pattern is utilized, then the tilt can be inspected, but a lot of noise is generated because the diffraction pattern is imaged in the air
Solution Approach 1:
The patent extracts the essential measurement information (focal position of reflected light) while eliminating the problematic diffraction pattern formation in air. By directly measuring the focal depth of reflected light from the device surface, the system obtains tilt information without generating the noise associated with atmospheric diffraction patterns.
Solution Approach 2:
The patent introduces a focal position detection mechanism as an intermediary between the light source and the tilt measurement. Instead of directly observing diffraction patterns in air (which generate noise), the system uses the focal position of reflected light as an intermediate measurement parameter that accurately reflects tilt without atmospheric interference.
3Adaptability or versatility
If the device is disposed or mounted in a tilted state with respect to the substrate depending on the application state of a solder or solder ball, then the mounting process flexibility is improved, but it may cause a defect in the substrate
Solution Approach 1:
The patent implements a feedback mechanism by measuring the tilt angle of the device before and during mounting using focal position detection. The measured tilt information is fed back to control the mounting process, allowing the system to adjust placement parameters to compensate for tilt, thereby preventing substrate defects while maintaining mounting flexibility.
Solution Approach 2:
The patent performs preliminary tilt measurement of the device before mounting using focal position detection. By measuring the tilt angle in advance, the system can pre-adjust mounting parameters and placement positioning to compensate for the device's tilted state, preventing substrate defects before they occur while allowing flexible mounting of various device orientations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate determination of the three-dimensional shape of objects with reduced noise and without the need for large inspection spaces, facilitating the downsizing of inspection equipment and improving measurement precision.
Implementation Method 1
a beam splitter and one or more lenses configured to change optical paths of the one or more second pattern lights so that a beam of light corresponding to a respective phase of the phase range spreads
Implementation Method 2
one or more first reflected lights generated by reflecting the one or more first pattern lights from the object and one or more second reflected lights generated by reflecting the one or more second pattern lights from the partial region
Implementation Method 3
determine the first three-dimensional shape of the object based on the one or more first reflected lights and the one or more second reflected lights... determine a second three-dimensional shape of the object based on each of phase changes of the one or more first reflected lights
Data Source
AI summary
The present disclosure proposes an apparatus for determining a first three-dimensional shape of an object. The apparatus includes one or more first light sources configured to irradiate one or more first pattern lights to the object, a second light source configured to sequentially irradiate one or more second pattern lights having one phase range, a beam splitter and one or more lenses configured to change optical paths of the one or more second pattern lights, an image sensor configured to capture one or more first reflected lights and one or more second reflected lights, and a processor configured to determine the first three-dimensional shape of the object based on the one or more first reflected lights and the one or more second reflected lights.