3D Shape Inspection Optics for Compact Tilt Measurement
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Solution Overview
Problem
Existing methods for determining the three-dimensional shape of objects, particularly in the context of device mounting on substrates, face challenges such as requiring large spaces for inspection due to sensitivity in measuring tilt angles and generating noise from diffraction patterns in air, which complicates downsizing inspection equipment and accuracy.
Innovation Solution
A detachable apparatus that uses pattern lights with specific phase ranges, beam splitters, and lenses to determine the angle of an object's upper surface relative to a reference plane by analyzing light amount values and phase changes of reflected lights, allowing for accurate three-dimensional shape determination and correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a method of irradiating light and inspecting tilt by using the position where reflected light forms an image is used, then the tilt of the upper surface can be inspected, but a large space is required to measure the imaging position of the reflected light
Solution Approach 1:
The patent introduces a beam splitter as an intermediary optical element that redirects reflected light to a camera positioned close to the inspection object. This mediator enables tilt measurement without requiring the camera to be positioned far away to capture the reflected light image, thus reducing the inspection equipment space while maintaining measurement precision.
Solution Approach 2:
The patent changes the measurement approach from directly imaging the reflected light position in space to measuring the phase change of structured light. This dimensional shift from spatial measurement to phase measurement allows for compact equipment arrangement while preserving tilt inspection accuracy.
2Measurement precision
If structured light is irradiated to form a diffraction pattern in the air above the device, then tilt can be inspected through phase change, but a lot of noise is generated because the diffraction pattern is imaged in the air
Solution Approach 1:
The patent extracts the useful information (phase change) from the structured light while eliminating the harmful diffraction pattern formation in air. By using a beam splitter to redirect the reflected structured light directly to the camera without allowing it to form diffraction patterns in the air, the system maintains tilt inspection capability while reducing noise.
3Productivity
If the device is mounted in a tilted state with respect to the substrate, then the mounting process may be completed, but a defect in the substrate is caused
Solution Approach 1:
The patent implements a feedback mechanism where the tilt angle of the mounted device is measured using structured light and beam splitter technology, and this measurement information is used to determine whether the mounting position is appropriate. This feedback loop ensures that tilted mounting that could cause substrate defects is detected and corrected, thereby maintaining substrate quality while enabling the mounting process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and accurate measurement of tilt angles, facilitating the downsizing of inspection equipment and reducing noise, thereby improving the precision and efficiency of three-dimensional shape determination.
Implementation Method 1
a beam splitter and one or more lenses configured to change optical paths of the one or more first pattern lights
Implementation Method 2
a first light source configured to sequentially irradiate one or more first pattern lights having one phase range
Implementation Method 3
first information on one or more first reflected lights generated by reflecting the one or more first pattern lights from the partial region
Data Source
AI summary
The present disclosure proposes a detachable second apparatus coupled to a first apparatus that determines a first three-dimensional shape of an object and configured to determine an angle of an upper surface of the object. The second apparatus includes a first light source configured to sequentially irradiate first pattern lights having one phase range, a beam splitter and lenses configured to change optical paths of the first pattern lights so that a beam of light corresponding to a respective phase of the phase range spreads, and arrives at each point of a partial region of the upper surface of the object, a communication interface, and a first processor configured to obtain first information on first reflected lights generated by reflecting the first pattern lights from the partial region and determine the angle of the upper surface with respect to the reference plane based on the first information.